The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 57.00000 lb. N59.

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

IR1000/2000/3000

Description IR1000 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 IR1010 P362030-201 Bracket P36202028 P36201023 Pressure gauge234 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-2-01 G43-4-01 G33-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

4/5 Port Solenoid Valve

0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to back page

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 2 x 1.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (WO): SY3120-WO(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8] 47.4[49.6

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

SYJ300/500/700

) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5

ZP

E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5

Air Fittings & Tubing

<M5, M6> D P M Part No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3243-L-M5 M8 connector (WO): 10-SYJ3243-WO-M5 M plug connector (M): 10-SYJ3243-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 M8 x 1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6 [103] R1 P R2 R1 P R2 R1 P R2 79 [83.4] 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to page 375 for dimensions with connector

Base Mounted Metal Seal/Rubber Seal Series VQ

L plug connector) 45 (M plug connector) 13.5 9.9 5.5 9 (4(A), 2(B) port) SMC 5 8.7 8.7 M5: M5 thread C4: One-touch fitting for 4 3-C4, M5(1(P), 4(A), 2(B) port) 60 M5 (5(R1) , 3(R2) port) < >: AC 3 position exhaust center: VQ0 5 3 4 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B EB P EA EB P EA 23.4 mounting holes 38 31 Lead wire length = 300 131<141> M plug

Table of Contents

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

SYJ3000/5000/7000

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] (Light/Surge voltage suppressor) 41.5 [48.5] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire