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22 Direct solenoid operated 512 Valve with spring retum To limit the size of th6 solenoid, larger and elastomer sealed valves have indirect (piloted) solenoid ooration.

IIIIIII

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Model Pilot operated, diaphragm poppet Air, Insert gas Valve construction Fluid Orifice VCH42 ON response 50 17.5 22 dm3/(sbar) (110 mm2) 0.11 5.8 16 17 dm3/(sbar) (85 mm2) 0.08 4.5 Flow characteristics 40 C value (Effective area) b Cv Response time [ms] Valve specification Coil specification VCH41 ON response 30 5.0 MPa 0.5 to 5.0 MPa 5 to 80C 5 to 80C Brass Polyurethane elastomer Drip proof

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 9 Booster Regulator Series VBA Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 Silencer (Option) 113 113 IN port Rc 1/4 IN port Rc 1/4 OUT port Rc 1/4 23 27 23 27 OUT port Rc 1/4 22 22 4 x 5.5 EXH port Rc 1/4 60 40 60

e

Nominal size Stroke Nominal size: 16 101.7 (74.7) (40) 60 80 Workpiece mounting center line 70 27 27 74.7 (60) LJ1 LJ1 72 40 Motor 102 42 60 LG1 LG1 43.5 71 (60) 60 LTF LTF 123 43 129 72.4 4 x counterbore depth 3.5 22 21.3 40 LC1 LC1 32 3.5 through 9.8 LC7 LC7 4 5 6 16.5 28 4 x M4 x 0.7 depth 7 LC8 LC8 T-slot section for mounting 4 5.6 (Max. 8.6) 14.4 152 + Stroke LXF LXF Encoder cable on

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

Process Valve Series VNA

32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

AC Servo Motor Driver (Pulse input type)

(Note 2) Alarm deactivation Display Name Alarm code AL.92 Battery cable Press disconnection warning Display CN1 CN1 CN1 Name "SET" on Alarm AL.96 Home position setting Power 22 23 24 current reset error OFF ON (bit2) (bit1) (bit0) alarm (RES) AL.99 Stroke limit warning screen.

AC Servo Motor Driver (SSCNET /H Type)

When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -58- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.

ZQ-OM01601

,ONOFF ON-OFF ON (22 -) "digit" 0 () SI ONOFF ON 12 - ON (22 -) (OUT1) "" 22 5R.D.(5) () "()" () F () 13 - ,FG 14 - NPN NPN 2 26.4V 80mA 2 V NPN (ZQ1-LW6-N-A) PNP PNP 2 80 mA2 V PNP (ZQ1-LW6-P-A) 15 - 133 1 1 1 1 16 - OUT1 (P_1),ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2 OUT2ON (P_1)OFF ((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (

Vacuum Gripper

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact P/A for detailed specifications, lead times and prices.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 2522 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50

Parallel Type Air Gripper Series MHZ

Kit includes items 21, 22, 23 and 24 from the table above. MHZA6-PS Seal kits consist of items 21, 22, 23 and 24 in one kit, and can be ordered using the seal kit number.

e-Rodless Actuator

Auto switch part no. 8 7 8 0.5 Lead wire length (m) 41 38 41 3 68 63 68 5 Auto Switch Internal Circuit D-M9N, D-M9NV Unit: mm Dimensions DC (+) Brown Mounting screw M2.5 x 4l Slotted set screw D-M9 Switch main circuit Switch main circuit Switch main circuit Indicator light OUT Black 2.6 2.7 2.8 4 DC () Blue 22 500 (3000) D-M9P, D-M9PV 3.2 DC (+) Brown 6 Most sensitive position 22 500 (3000