VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

Air Cylinder Series CS1

5 6 178 166 5 x 80 175 105 84.5 IYincludes a pin and 2 cotter pins.

MRQ

5 !6 !7 !8 !

VK300

(-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

5 Please order 1 piece finger assembly per one unit.

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

3 Position Cylinder Series RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Optional Standard 1 2 3 Stainless steel Body Brass Tube assembly Stainless steel Coil assembly VDW11/21: Stainless steel, PPS, NBR VDW11/21: Stainless steel, PPS, FKM 4 Amature assembly VDW31: Stainless steel, FKM VDW31: Stainless steel, NBR 5 6 7 8 FKM O-ring (body) NBR Return spring Stainless steel Cover SPCE Clip Stainless steel 5 Compact Direct Operated Series VDW10/20/30 2 Port

48

Stroke can be modified in 5 mm increments. Part no.

CXT

20 15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder

Compact Electric Actuator Series LG1

CZ Z (Pin 14 is GND) 26 FG CN I/F 12 Series LG1H High Rigidity Direct Acting Guide Type Nonstandard Motors/Mitsubishi Electric Corporation Drivers Dimensions (Without RS-232C option unit) 100 40 1-5 hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

CNS

5!8#3 !7#2@1@2@8w!1#8%4%7$7tyo$9u$3!0 %3!9 %6@0 CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com %2@9#5#0 !3$2$1@6#6%0 @4@5!4$8#9#1#7$0e !2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Lubricator

Note 2) : For NPT thread type only. -8- 5. Structural Drawing, Option and Replacement Parts Structural drawing / Option / Replacement parts AL30-D / AL40-D AL50-D / AL60-D AL20-D (2) (3) (2) (3) (1) (1) (5) (4) (5) (4) (6) (6) (7) (7) Option Description No. Note 1) Part No.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

MHS

C C 2 5 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 21 1.

VK300

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.