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Note 5) M and MO type connectors cannot be selected for the model with the pressure sensor or the pressure switch for vacuum. 11 - Doc. no.

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

No.EX-OMP0013-E PRODUCT NAME SI unit for EtherNet/IPTM MODEL / Series / Product Number EX260-SEN# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Definition and terminology 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication and Settings 16 Hardware configuration 19 EDS file and icon 19 Setting using RSLogix5000TM

500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200

2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

Refer to "Auto Switch Mounting Strokes for 8" on page 11. Refer to the standard stroke table on page 2. Rod end configuration End lock Nil R Without end lock With rear end lock Nil M Rod end female threads Rod end male threads Applicable auto switches/Refer to pages 14 through 18 for detailed auto switch specifications.

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

No.EX-OMX1001 PRODUCT NAME SI unit for EtherNet/IPTM MODEL / Series / Product Number EX260-SEN2-X205 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication and Settings 16 Hardware Configuration 19 EDS file and icon 19 Setting using RSLogix5000TM

~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

(No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and F.E. Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.

Approx. 500 15 23 Pressure switch C B JIS Symbol Center of F.R.L. body A D Specifications A B C D Fluid Proof pressure Maximum operating pressure Model IS1000M-20 IS1000M-30 IS1000M-40 Applicable model ACG20/ACG20B/ACG20C ACG30/ACG30B/ACG30C ACG40/ACG40B/ACG40C Air 1.0 MPa 0.7 MPa 0.1 to 0.4 MPa 0.08 MPa 5 to 60C (With no freezing) 11 76 66 28 13 86 72 30 Regulating pressure range (when off

(P.1088) 1) Maximum operating pressure 2400 psig (16.5 MPa) for connection size 3/4 inch. 2) -10 to 90 C for Polyimide seat. 3) Figure of 1/2 inch connection. 4) Tested with Helium gas inlet pressure 500 psig (3.5 MPa). 5) Weight, including individual boxed weight, may vary depending on connections or options.

1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

/min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 0.204 0.4 0.6 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.202 0.5 Set point 0.3 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.