Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

44

19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8" (3.18) 0.086" (2.18) 1 7 8 14.5 5 1.5 M L1 KQB2 5/32" (4) 0.098" (2.5) H1 1.4 7 8 14.5 5 1.8 d KS KX 1/4" (6.35) 5/32" (3.95) 5 10 12 16.2 6 3.3 A L2 H2 KM 5/16" (8) 0.236" (6) H3 14 12 14 18.4 6.6 5.3 KF Connection thread 3/8" (9.53) 1/4" (6.35) 16 15 17 21.4 7.6 5.6 M 1/2" (12.7) 3/8" (9.53) H/DL L/LL 43 17 19 23 8.5 8.5 Reference dimensions

Water-cooledThermo-chiller

75 60 60 45 45 Outlet pressure [50 Hz] Return port pressure 30 30 15 15 Return port pressure 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.

3 Port Solenoid Valve

CAT.ES11-82 B 3 Port Solenoid Valve Power consumption 0.1 W (with power saving circuit) Power consumption 0.1 W (with power saving circuit) Power consumption 0.1 W (with power saving circuit) Series V100 Coil temperature rises: 1C (with power saving circuit) Sonic conductance C: 0.037 (Standard)/C: 0.076 (Large flow capacity) Series Flow characteristics C[dm3/(s bar)] b Cv Standard Large

DOC1023125

Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Speed loop P constant A 110 140 140 1 to 200 B 120 75 100 C 150 120 120 H 50 80 80 Sets the speed loop I constant.

DOC1023126

Speed loop I constant A 100 100 10 to 200 B 100 80 C 100 100 Positioning time level 2 2 Sets the time to generate the positioning time error alarm. (Unit: s) 0.1 to 25.5 75 - *1 After changing the rotation direction reference and turning on the power again, return to origin is executed with the first movement command.

MONOSASHI-KUN

Allowable Kinetic Energy 11 3-3-1. Allowable Kinetic Energy 11 3-3-2. Mass of Cylinder Movable Parts11 3-3-3. Load mass and Piston Speed 11 4. Wiring 4-1. Connector Wiring Table 12 4-2. Wiring for Counter 12 4-3. Noise countermeasures 12 5. Structure and Measuring Principle 5-1. Structure 13 5-2. Measuring Principle 14 5-3. Relationship Between Pulse and Count 14 6.

Air Catch Sensor Series ISA

Assembly 806 Air Catch Sensor Series ISA2 Parts List End plate R ISA-6-B Terminal block box Switch mounting bracket ISA-3-A Left Right ISA-7-B Seal for additional station ISA-6-A End plate L ZSE ISE Throttle 2 port solenoid valve ZSP Spacer PS Regulator Y20 ISA Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized wiring/Supply port right) PSE IS IN ISG ZSM

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Digital Flow Switch Series PFA For Air Series PFW For Water

C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured

High Vacuum L Type Valve

when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83

LJ1H

(B contact) 2 pcs.

SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

5 Port Solenoid Valve

3-position exhaust center: VQC440 3-position pressure center: VQC450 3-position double check: VQC460 0 1 0 1 0 1 0 1 0 1 179 2 90 73 106 50 11 (12.5) 2(B) port 11 (12.5) 4(A) port Indicator light 50 59 73 106 165 179 2 Indicator light 2 4 90 24.6 38 48 11 (12.5) 4(A) port 11 (12.5) 2(B) port B A 14 12 1 5 3 4 2 Manual override 30 45 38 24.6 A B 2 x 5.6 Mounting hole 48 B A 14 12 5 3 1 45

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

XLDV Series

M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153 116.5 10 XL-OMM0005-A 6 Period and Scope of Warranty The

VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.

air-filter-e

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered

Air Preparation Equipment

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered