Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, 4 Port Solenoid Valve, 4/5 PORT SOLENOID VALVE, 34 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, 4 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 34.00000 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, 4 PORT VALVE, 4/5 PORT SOLENOID VALVE, 34.00000 lb

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50C, VALVE, SOL, VALVE, VQD1151 VALVE, SOL 4/5-PORT, 2D, VQD1151 NO SIZE RATING, .11869 lb

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

Compact Cylinder

27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

3 Port Air Operated Valve

812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

Applicable Auto Switch Model

11 11 11 10 10 9 9 8 8 10 10 Surge absober 10 11 11 11 9 10 10 10 9 9 8 8 10 10 Note) Average value at normal temperature including hysteresis.

Stroke Reading Cylinder and Counter

x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod end nut accessory bracket, refer to page 658.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Precision Cylinder Series MTS

+ Stroke 18 25 M5 x 0.8 120.5 + Stroke 16 0.2 22 24 0.2 4-M5 x 0.8, effective length 8 Rod end male threads 10h7 0 0.015 Width across flats 8 M6 x 1 M6 x 1.0 9.8 11.5 10 5 10 12 4.5 34.5 Stud bolt part number: MT-S20 Rod end nut part number: NT-015A 11.5 Width across flats 14 With end lock 3 119.5 + Stroke 137.5 + Stroke Basic type With end lock Accessories SMTS20, #1 (#1 + #2) SMTS20, #2

Solid State Auto Switches

Applicable bore size (mm) 40 50 63 80 100 Z C HW H H T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 44 52 64 78 92 69 77 91 107 121 57 58 60.5 64 67 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1590 2-Color Indication Type Solid State Auto Switch Direct Mounting

3 Port Air Operated Valve Series SYJA300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

Compact Cylinder

x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range