4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Free Mount Cylinder for Vacuum Series ZCUK

SP ZCUK (mm) W B D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) AMJ B A W 16.5 A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 3 12.5 16.5 1.5 (1) AMV 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) AEP 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) HEP Note 1) Figures in the table above are used as a reference when mounting the auto switches

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Digital Flow Switch (Integrated display type) ( compatible)

Min. to Max. a to b c to d PF3W7 oC Common 0 to 100 -10 to 110 0 to 1000 -100 to 1100 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

DOC1018150

Description Material Note 1 Body PBT 1 Body PBT Electroless Electroless 2 Cover A BRASS nickel 2 Cover A BRASS nickel Plated Plated Electroless Electroless 3 Cover B BRASS nickel 3 Cover B BRASS nickel Plated Plated 4 Piston POM 4 Piston POM 5 Retainer POM 5 Retainer POM Electroless Electroless 6 Spool Ass'y nickel 6 Spool Ass'y nickel Plated Plated 7 Spring SUS 7 Spring SUS 8 Body Ass'y(

End Lock Cylinder Series CBJ2

105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in the

Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

Digital Pressure Switch

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

Digital Pressure Switch

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

Mist Separator Regulator

AWM20-D AWM30-D AWM40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 Rc G46-10-01 Pressure gauge Note 2) G36-10-N01 G46-10-N01 NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Ｍ icro Mist Separator Regulator

AWD20-D AWD30-D AWD40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S Rc G46-10-01 G36-10-01 G36-10-N01 G46-10-N01 Pressure gauge Note 2) NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Air Catch Sensor Series ISA

(O-ring: 2, Gasket: 1 enclosed) ISA11-0 For NPN output For PNP output ISA15-0 817 Series ISA Dimensions: Centralized Wiring Type (Terminal Block Box Type) Body Manifold With bracket 34 L2 40 34 L1 Deviation level indicator light Terminal block box 75 Deviation level indicator light Terminal block box 90 10 10 40 90 10 10 Rc 1/8 SUP port (94.4) 70 100 DIN rail center (94.4) 70 100 SUP 40 (

Digital Pressure Switch

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Standard Combinations

Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35