type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P): 3/8, 1/2., 3/4, Tubing size (port A): 1/4, 3/8, 1/2, 3/4, MFLD BASE, REQ SHIKOMI/RSTRCTD, VALVE, FLUOROPOLYMER, 2.54320 lb, ModelManifold typeP (IN), A (OUT) typeValve stationsTubing size (port P)Tubing size (port A)LLC4AStacking typeCommon IN/Individual OUT2 to 5 stations3/41

Oval pad with buffer , Lateral vacuum inlet direction , 12 pad sizes , Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 41 lb

HEC-OM-S008

read 0001 Quantity of register to read 094D Information of 0040H (circulating fluid discharge temperature: 23.81oC) BB LRC A4 LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41

XL-OMY0001

/ AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

XL-OMV0002

3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41

AUTO SWITCH, AUTO-SWITCH, 605, 41 lb

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.64696 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.67660 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.76516 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DC, AC MASS PRO 1/4 MODULAR (NPT), 1.67660 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, CA, AC MASS PRO 1/8 MODULAR (PT), 1.94557 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, CA, AC MASS PRO 1/8 MODULAR (PT), 1.98416 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DA, AC MASS PRO 1/4 MODULAR (PT), 1.65346 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DA, AC MASS PRO 1/4 MODULAR (PT), 1.84385 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

EQUIPMENT, AC MASS PRO, DA, AC MASS PRO 1/4 MODULAR (PT), 1.70858 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingRecommended lubricantBowl materialBowl guardRegulator constructionMass (kg)Filter regulatorLubricatorAC20AAW20AL201/8, 1/41

/R COMBO MODULAR, AIRLINE EQUIPMENT, AC MASS PRO, CA, AC MASS PRO 1/8 MODULAR (PT), 1.37788 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingBowl materialBowl guardRegulator constructionMass (kg)Air filterRegulatorAC20BAF20AR201/8, 1/41

R COMBO MODULAR, AIRLINE EQUIPMENT, AC MASS PRO, CC, AC MASS PRO 1/8 MODULAR (NPT), 1.71470 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingBowl materialBowl guardRegulator constructionMass (kg)Air filterRegulatorAC20BAF20AR201/8, 1/41