Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: MT (M + T)
Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AKMT (A + K + M + T)
Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KMT (K + M + T)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor)
Series: NCDA1 (Standard w/ Magnet), Mounting: T (MT4, Center trunnion), Bore Size: 150 (1 1/2"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: F (Flanged), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: A (10m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 2 (2m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card
Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: T6 (AC Servo Motor, Absolute Encoder, Output 100W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card
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The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C4 (Body Ported ø4 One-touch Fiitting), Thread:
Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor)
Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: N9 (5/16" One-touch Fitting), Thread: T (NPTF)
Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: C (5mm), Stroke: 250mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange), Cable Type: S (Standard Cable), Cable Length: 5m, Driver Type: 92 [LECSN2-T
Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: C (5mm), Stroke: 450mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange), Cable Type: S (Standard Cable), Cable Length: 5m, Driver Type: 92 [LECSN2-T EtherNet
Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: C (5mm), Stroke: 150mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange), Cable Type: S (Standard Cable), Cable Length: 5m, Driver Type: 92 [LECSN2-T EtherNet
), Driver Type: 92 [LECSN2-T EtherNet/IPâ„¢ (Absolute Encoder) 200V to 240V], I/O Connector: 1 (1.5m)