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A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

ZH-X226 suction flow rate of 405 L/min (ANR), discharge flow rate of 700 L/min (ANR), air consumption 207 L/min (ANR); ZH-X249 suction flow rate of 880 L/min (ANR), discharge flow rate of 1550 L/min (ANR), air consumption 570 L/min (ANR); ZH-X338 suction flow rate of 820 L/min (ANR), discharge flow rate of 1160 L/min (ANR), air consumption 340 L/min (ANR)

ZH-X226 suction flow rate of 405 L/min (ANR), discharge flow rate of 700 L/min (ANR), air consumption 207 L/min (ANR); ZH-X249 suction flow rate of 880 L/min (ANR), discharge flow rate of 1550 L/min (ANR), air consumption 570 L/min (ANR); ZH-X338 suction flow rate of 820 L/min (ANR), discharge flow rate of 1160 L/min (ANR), air consumption 340 L/min (ANR)

Up to 10 units (including the SI unit) can be connected to one manifold. 4 Number of IO-Link ports 2 Sensor supply current per connector ("L+" and "L-") 0.5 A/connector 2 A/unit 0.5 A/connector 1 A/unit If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.

L/A indicator Table 10-22 L/A indicator L/A 1/2 Meaning Green ON Connection via Ethernet to the SI Unit via Port 1/2 (XF1/2) Green OFF No connection established via Port 1/2 (XF1/2) Yellow ON Transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Yellow OFF No transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Orange Flash Received Node flash request : When

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

Bracket mounting Mount the bracket using the mounting screws (M3 x 15 L) suppllied. The required tightening torque is 0.320.02 Nm. L-type bracket (Through hole) Mounting screw (M3 x 15 L) Mounting screw (M3 x 5 L) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

. -20No.PF-OMO0010-C Specification Specifications Specifications of body Model PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Applicable fluid Air and N2 Fluid temperature 0 to 50 C (no condensation or freezing) Flow Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Pressure Rated pressure range -50 kPa to 0.5 MPa -50 kPa to 0.75 MPa Proof pressure 1.0

mode [d_1] Display instantaneous flow Common Unit selection function [U_1] L/min Indicator LED Indicates the reference condition selected.

g0h l)i dQ Shaft 8 for mounting (Should be prepared by user) Mounting hole 8 Attached thread M5x0.8 IZS30-D1 Power supply cable (IZS30-CP) Sensor cable (IZS30-CS)

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3

B3 4 15 16 (11) 30.7 L 15.4 ()[820m] 1 2 LE CP B 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 4 + B-1 4 A-1 5 + B-3 1 A-3 2 60 - 1 2 5.5 A1 (1) B1 (14) (18) 6.3 17.7 10.2 5 6 (2) (14.2) A6 B6 (3) 1 2 A1 B1 A3 B3 5.7 (4) 15 16 L 30.7 (11) 61 - 15.5 LEC

Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

Start flag 0: no send Numerical data input 16 1: send 1 Step data No 0 to 63 Data writting 17 Operation Note) 1 1: Absolute 2: Relative 18 H 19 L Speed 2 0 to 65500 mm/s 20 3 21 2 Position 4 +/-2147483647 0.01mm 22 1 23 0 24 H ID1 Numerical 25 L Acceleration 2 0 to 65500 mm/s2 data input 26 H 27 L Deceleration 2 0 to 65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1

bit 0,1 3 RESET bit 0,1 15 4 SETUP bit 0,1 5 bit 0 6 bit 0 7 bit 0 LECP6 LECA6 37 - Bit/Byte / Q_Address ID No. 0 1 16 1 063 1ABS 17 1 2INC() 18 H 2 065500 mm/s 19 L 20 3 21 2 4 2147483647 0.01mm 22 1 23 0 ID1 24 H 2 065500 mm/s2 25 L 26 H 2 065500 mm/s2 27 L 28 1 030 10% 29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1

L 0.5m 1 1m 2 Branch connector LEC-CGD The junction cable to connect the gateway and the controller. 3 Cable between branches LEC-CG2Cable to connect the branch connector.

min(ANR) Outlet air flow rate L/min(ANR) Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa *Note 3 0.7 25 25 Inlet air temperature oC Inlet air saturation temperature oC 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} 25 Ambient temperature oC Dew point indicator purge air flow rate Regulator construction (about Type V) Relief type Port size 3/

ZQ-OM00801-D Circuit Diagram Specifications of a Single Unit Ejector System L a L a L a t t t c h c h c h i i i L a L a L a n g n g n g 32 t t t t t t c c c y y y h h h Doc. no. ZQ-OM00801-D Pump system 33 - Doc. no. ZQ-OM00801-D Manifold Specifications Ejector System ZZQ1-BSB ZZQ1-BSC Pump system ZZQ1-OB ZZQ1-OC 34 - Doc. no. ZQ-OM00801-D Mass Ejector System Pump system 35 - Doc. no.