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IDF22E75E 54116kgIDF22E,37E 4 IDF55E,75E 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm ( ) 600 mm IDF Series 2-1 2 1 IDX-OM-W026 2 2 2 2 6 6-3 IDF-AB500 14 1 IDF22E,IDF37E,IDF55E,IDF75E 2 2 3 50 50 OUT IN (IN) (OUT) IDF-BP317 1 IDF22E IDF-BP318 1 IDF37E IDF-BP325 1 IDF55E IDF75E 2 2 4 10mm IDF Series 2-2 2 2 IDX-OM-W026 2 2 2 5 6-1 IEC () AC200V 30mA 10A IDF75E 15A

m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36-104 F (2-40C) (85%) () 1 AC115V10% 60Hz (Note3) (2) 2.7A 3.0A 3.5A 6.5A 8.5A (2) 240W 260W 310W 550W 800W 15A

O. () ) 22240psi (0.15 ~ 1.6MPa) 3/h(ANR)] ) 1.77SCFM(ANR)[3m 8-4 8-3 (ADH4000-04) IDFB Series 8-2 IDX-OM-W035 9 R 9 R 9-1 9-2 IDFB22E-11-R 15A 30mA IDFB22E/37E-23-R IDFB55E/75E-46-R 10A 30mA 9-3 (IDFB55E,75E) (IDFB55E,75E) 9-1 IDFB Series 9-1 IDX-OM-W035 9 R IDFB22E/37E 0.37inch (9.5mm) L N () PE () 0.26inch (6.5mm) IDFB55E/75E 0.4inch (10mm) 0.4inch (10mm) L1 L2 L3

IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN (IN) IDU-BP336 1 IDU22E (OUT) IDU-BP337 1 IDU37E 1 IDU55E IDU-BP338 1 IDU75E 2 2 4 10mm IDU Series 2-2 2 2 IDX-OM-W029 2 2 2 5 6-1 IEC AC230V [30mA 10AIDU75E 20A] AC200V [30mA 10AIDU75E 15A

Without sub-plate 00 VPA4 54, 4 74 JIS Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 03 2 position double 2 position single Body size VPA4150/4170 VPA4250/4270 04 06 10 0 1 VPA4 5 Piping standard 3 4 standard 11 4 Side ported Bottom ported W/o sub-plate 5 7 0 1 12 14 0 1 VPA4 7 4 Option Side piping only 3 position exhaust center 3 position closed center VPA4350 VPA4450

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H. D-A73C D-480, D-A80H. D-A80C D-F7NTL, D-F7NV, D-F79 (sorid state type) t : I Bne @ Black lfihitel Latch ire dEonosl c oLnoul Or:nqdibuei (whi1e) O Bue tbtacb a O Blue (black) D-J79. D-J79C.

(mm) Model Av x 10-6m2 Cv converted 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1 (25A) 46 58 130 220 290 1.9 2.4 5.3 9.2 12.0 VXEZ2230-02 VXEZ2230-03 VXEZ2240-04 VXEZ2350-06 VXEZ2360-10 550 10 0.7 0 760 1300 1480 15 20 25 1.5 1.0 Weight of grommet type. Add 10 g for conduit, 30 g for DIN terminal, and 60 g for conduit terminal type respectively.

/80/90 Series 6-4 IDX-OM-W095 7 7.1 IDFC60-23 IDFC70-23 IDFC80-23 IDFC90-23 2080 0.151.0MPa (7) (1) () 2045 oC85% (2) 20 oC 4.7m 3/min 7.8m 3/min 10.9m 3/min 15.4m 3/min 10 oC 2.8m 3/min 4.7m 3/min 6.5m 3/min 9.2m 3/min 3 oC 0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

IN OUT 2.2.4 10mm ( IDFA100F150F 2 4 2.2 IDX-OM-U022 2. 2.2.5 IDFA100F150F 2 5 2.2 IDX-OM-U022 2. 2.2.6 6-1 IEC [] ) [30mA 15A] [] [IDFA100F, 125F] 3.5mm 2 (12AWG) 1418mm4 () [IDFA150F] 3.5mm 2 (12AWG) 1823mm4 () 0.6m [] 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDFA100F150F 2 6 2.2 IDX-OM-U022 2. 0.5mm 2 (20AWG)17mm 6 0.9m 30m (1.3 ) M3 : 6.5mm

Connection cable A/IZS31-CF End bracket/IZS31-BE Connection cable B/IZS31-CR Auto balance sensor [Body mounting type]/IZS31-DE Sensor bracket/IZS31-BL M4 screw (provided together with the IZS31-BE) Ionizer/IZS31 M3 screw (provided together with the IZS31-BL) Power supply cable/IZS31-CP 12 Doc.No.IZ-OMK0015D 1-4.

r e po't 2 F \ l i t ( ) :Oin ior NCRAIOW30 s5r NCDRBl BW2O-O S-O i : l,4ax krnelic eneGv foi tubber bumpers (Not available on NCDF Bl BW 1 O) Applicable Series a o o X o O = avairabre cD8B1AWt5 lvlax. Current and Operating Max. 50mA 5-40m4 5 -40mA N4ax.50rnA Max. 40mA l\4ax.20mA D-R8 D-57 N4ax.40mA 150mA T? . Operating lemp (5 60'c) . Length of lead wire 0.5m (slandard) .

Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H. D-A73C D-480, D-A80H. D-A80C D-F7NTL, D-F7NV, D-F79 (sorid state type) t : I Bne @ Black lfihitel Latch ire dEonosl c oLnoul Or:nqdibuei (whi1e) O Bue tbtacb a O Blue (black) D-J79. D-J79C.

Applic~bl e max. stroke according,to bUC~jng strength(ern} . . ,.e '. ' . Mounting Operating pressure 125 ,140 . . , 160 , JJ 0 c.

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A

Types 10, 20 VDW 0 15A 1 2 66 (62.5) 6 12.8 Series 8.5 (6.3) 1 2 10 20 Type 30 1/8, 1/4 1 (IN) port VCW20 12 01A 1/8, 1/4 2 (OUT) port Dimensions inside ( ) are for port size 1/8. 2-M4 x 0.7 Thread depth 6 6 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 How to Order Manifolds How to Order Manifold Assemblies (Example) VV2DW 2 05 01 Enter the valve and

52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A 4.8A 10A 5A 5A 15A

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A

M14 x 1 Notice label Locking condition indication plate S + Stroke ZZ + Stroke Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C BL C CC D D E EE E F FF GA GB GC GD GL H1 J K M AA AL BB Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 71.5 22 60 42 20 44 22 16 21 11 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650