Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(122) 5H9 (+0.030 0 ) depth 5 70 Body mounting reference plane (B dimension range)1 42 4 x M6 x 1, thread depth 9.9 44 5.5 60 5H9 (+0.030 0 ) depth 5 L Cable length 250 (62) A (Table traveling distance)2 62 (142) (2.4) [Origin]4 (4) [2]4 10 (66) [64]4 Stroke 65 64 [(66)]4 (70) 24 2 [(4)]4 48 Origin3 (79) 6.5 Motor cable 30 Auto switch groove5 46.8 60 M4 x 0.7, thread depth 8 (F.G. terminal

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

4 4 26-0.033 0 26-0.033 0 32-0.039 0 8 10 M32 x 2 82 36 The bracket is shipped together.

RSQ

4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

LEC-OM034xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 32 - 9.

ITV

Note 4) Contact SMC regarding indication with other units of pressure.

VCW

0.40 1/2: 0.49 5 3 VCW3 0.5 0.23 14.4 (0.80) 3.0 7 0.2 0.13 24.8 (1.38) 10 0.1 37.8 (2.10) 3 3.0 1.2 6.3 (0.35) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 0.73 10.8 (0.60) 5 0.7 0.47 15.3 (0.85) 3.0 4 VCW4 7 0.3 0.22 24.8 (1.38) 10 0.12 37.8 (2.10) Note 1) Refer to model selection on page 9 regarding port size and orifice size combinations.

PF2D

Brown 4 3 2 1 4 3 2 1 Sensor Sensor PF2D PF2D Load U CH_1OUT2 CH_1OUT2 White White IF Load Load 4 3 2 1 4 3 2 1 Sensor Sensor Sensor Sensor Sensor Sensor CH2_OUT1 CH2_OUT1 Gray Gray Main circuit Main circuit 24 VDC + 24 VDC + Load Load 4 3 2 1 4 3 2 1 CH3_OUT1 CH3_OUT1 Red Red Load Load CH4_OUT1 CH4_OUT1 Green Green 4 3 2 1 4 3 2 1 Load U DC() DC() Blue Blue 389 PF2D Series Functions/PF2D

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

Digital Flow Switch (Integrated display type) ( compatible)

Option Part number Remarks ZS-40-K Taptite screw for PF3W704/720 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W740 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

LEC-OM032xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 29 - 8.

HEC_001W-E

SENSOR FINE CONTROL FUNCTION -3-7 3.6.6 SETTING VALUE MEMORY FUNCTION -3-8 (FUNCTION THAT BACKS UP WITH EEPROM) -3-8 3.6.7 SERIAL COMMUNICATION FUNCTION -3-8 3.6.8 UPPER/ LOWER TEMPERATURE LIMIT ALARM FUNCTION -3-8 3.6.9 WARNING OF OUTPUT INTERRUPTION -3-8 4 NAMES AND FUNCTIONS OF COMPONENTS -4-1 4.1 DESCRIPTION OF PARTS-4-1 4.2 OPERATION PANEL -4-2 4.3 DISPLAY -4-3 4.4 RESERVOIR CAP -4-

Electric Actuators

4.

Step Motor Controller (Servo / 24 VDC)

Safety Instructions . 4 2.

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

IDX-OM-Z004

b) 1. 2. 3. 4.2.2 4.2 IDF100150F-W 4 4 IDX-OM-Z004 4 501015 ( ) ,0 () 4.2 IDF100150F-W 4 5 IDX-OM-Z004 4 OFF 5 4 (4 ) () O O O O 3mm ) 4 5Nm ADH-E400 1 4.2 IDF100150F-W 4 6 IDX-OM-Z004 4 4.2.3 V ON ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 0.5 ON:SEC OFF:MIN 4.2.4 7 25 Y92S-36/CR2477/ 0 MEMO h (h) 4.2 IDF100150F-W 4 7 IDX-OM-Z004 4 , OFF [] 4.2 IDF100150F-W 4 8 IDX-OM-Z004 4 (+,

IDX-OM-W029

i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3

IDX-OM-N030

. 5 Check items after starting .3 2 3 . 6 Display of controller .3 3 3 . 7 Signal output .3 4 Table of Contents1 Air Dryer Table of Contents Chapter 4 Checks and inspection 4 . 1 Daily check .4 1 4 . 2 Parts requiring regular maintenance .4 1 4. 2. 1 Cleaning of filter at ventilation air inlet (suction port) .4 1 4. 2. 2 Maintenance of auto drain .4 1 4. 2. 3 Maintenance of timer type solenoid

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.