SI Unit for Vacuum Manifold

of CH14 ejector 5 Release confirmation of CH14 ejector 6 Vacuum confirmation of CH15 ejector 7 Release confirmation of CH15 ejector -25No.EX-OMZ0018 4.2.

IDX-OM-U010

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

IDX-OM-V020

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

1

Method of Mounting Two Auto Switches at the Stroke End of a Cylinder for Strokes Less Than 20 mm Auto switch model Applicable strokes 15 mm stroke 20 mm stroke 15 6 3 A 6 A 20 0.5 D-M9m(V) D-M9mW(V) D-M9mA(V) 0.5 3 6 B 6 B The correct mounting position of the D-M9 is 3 mm from the end face of the switch holder (dimensions A and B).

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

CRQ2

6 i q w r @5 y !5 !

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Fieldbus system Ethernet POWERLINK compatible SI unit

Unit parameter is set to Via software. 39 EX## OMS1015-A 6.

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

Multi-channel Digital Sensor Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) Check if there is a noise source nearby. System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%.

CEx-OMB0060

Outside Dimensions 4 Chapter 3: Functions and Terminology 5 Chapter 4: Specifications 8 Chapter 5: Description of Each Part 10 Chapter 6: Wiring 6-1. Terminal block arrangement 11 6-2. Wiring of sensor input part 11 6-3. Wiring of control signal input part 12 6-4. Wiring of output part 12 6-5. Wiring of RS-232C 12 6-6.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

( Up to 7% reduction in square area installation Up to 35% reduction in cubic area installation ( Wide variety of manifold option Accommodates enclosure IP65 Dust/Splashproof type 3-11-1 2 ISO Standard Solenoid Valve Size 1, 2, 3/Single Unit Series EVS7-6/7-8/7-10 How to Order S 3 EVS7 6 FG M0 Valve Size 6 8 10 Thread type Size 1 Nil F T Rc Size 2 G Size 3 NPTF Passage symbol Courtesy of

Plate Cylinder

50 6 63 6 15 1 15 2 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !