MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Digital Pressure Switch

Linearity 1%F.S. Analogue output Output impedance approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5%F.S. 2.4 to 20 mA Current output 3 2.5%F.S. Linearity 1%F.S.

KFx-OMV0011

soft nylon TAU Antistatic polyurethane 1/8 KFG201-P01 5/32 KFG203-P01 4 KFG204-P01 6 KFG206-P01 1/4 KFG207-P01 8 KFG208-P01 Bulkhead nut SUS316 5/16 KFG209-P01 10 KFG210-P01 3/8 KFG211-P01 12 KFG212-P01 1/2 KFG213-P01 16 KFG216-P01 4.

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm R M Note) External pilot 18 mm and 26 mm sizes mixed Note) Refer to pages 27 and 28 for details of option M.

ML1

1 !2 !3 !4 !5 !6 !7 !8 !

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

26.1 18.0 6 15.2 5 16 1 4 1 4 3 8 17.46 17 22.23 36.3 29.5 7 17.9 3 8 22 21 Reference dimensions after NPT thread installation.

VHS

2 3 4 5 1/8 3/8 1/2 1 SMC Interface part is required if attached to a modular FRL.

CEx-OML0058

Measuring Principle 22 Chapter 8: Brake Mechanism 8-1. Working Principle of Brake Mechanism 22 8-2. Manually Unlocking 23 8-3. How to change from Unlocked to Locked State 23 8-4. Holding Force of Locking 24 8-5.

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

Digital Pressure Switch

Output voltage Linearity: 1% F.S. Linearity: 1% F.S. Linearity: 1% F.S. Output impedance Approx. 1 k Analogue output 2.4 to 20 mA 3.2 to 20 mA 4 to 20 mA 2.5% F.S. 2.5% F.S. 2.5%F.S. Output current Current output 3 Linearity: 1% F.S. Linearity: 1% F.S. Linearity: 1% F.S.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 17 10 14 15 3 5 27 11 12 6 9 14 12 1 4 11 9 27 2 4 19 15 8 18 41 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (18). Table (18) Parts where grease is to be applied 2. Mount the tube gasket 11 to the left cover 3 to mount to the body 1 .

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603. Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AMF

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

C92

1 !2 !3 No. !4 !5 !6 !7 !8 !

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate