! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Safety Instructions

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 2-5.5 Mounting hole Pilot EXH. 177 2-1/4 3 1 9 23 Manual override (Non-locking) 4-17-2 3 NAMUR Interface 3 Port Solenoid Valve Series VFN200N NAMUR Mounting Pattern

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i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

1 y !2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

EX600-AX_AY_AM_eng

Status display LED 1 3 4 6 Description Function 2 4 5 Displays the status of the unit.

FGE-C

) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.

High Purity Fluoropolymer Needle Valve Series LVN 1

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

EX600-SEN_eng

ON ON ON ON ON ON ON Settings3 Settings3 Settings1 Settings3 Communication speed full duplex/half duplex setting 6 1 3 ON/OFF ON/OFF Configuration 3 4 1 2 OFF OFF OFF ON ON ON 8 4 5 5 : : BUS IN ON/OFF OFF OFF OFF OFF Settings3 ON ON ON OFF OFF 2 4 ON ON ON 7 8 Setting3 Setting1 Holds the output. Output is off.

PF2x2.eng

After the product makes contact with the panel, the screws should be further tightened 1/4 to 1/2 turn. The self tapping screws cannot be re-used. Display mode Input of the Set value for the lower 3 digits Select the channel to be copied Input of the Set point 1 Do not operate in an atmosphere containing flammable, explosive or corrosive gas. Fire, explosion or corrosion can result.

Filter Regulator AW30, 40

04 06 1 4 3 8 Note 2) 1 2 3 4 Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the filter regulator for shipment.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

26.1 18.0 6 15.2 5 16 1 4 1 4 3 8 17.46 17 22.23 36.3 29.5 7 17.9 3 8 22 21 Reference dimensions after NPT thread installation.

Clean Exhaust Filter

Warning 1.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 (Piping port) (Opposite side.: Same) 2 x M5 x 0.8 thread depth 4.5 Note) 4 x M3 x 0.5 thread depth 4.5 (Opposite side: Same) (15+1/2ST) 19 (Opposite side: Same) 6 3 9.5 27.5 11 (19) (15+1/2ST) 4 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Regulator AR30 to 60

R Z Standard specifications AR40 AR40-06 AR50 AR60 1 AR30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Gauge port size Relief pressure Ambient and fluid temperature Construction Weight (kg) 1 2 1 4 3 8 , 1 4 3 8 , , 4 3 3 4 1 , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa 1 4 1 4 1 8 1 4 1 4 Note 1) Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(

IDUS/IDFS

2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

EX600-SPRA_eng

ON ON Settings2 Settings1 Settings2 1 Terminal resistor OFF (default setting) Terminal resistor ON Terminal resistor OFF 1 2 3 4 ON 4 3 2 1 OFF OFF ON ON 4 8 BUS IN BUS OUT OFF OFF 5 ON ON 2 Settings2 1 2 3 4 5 6 7 8 ON Holds the output. Clears the output.