EX500-GPR1A.eng

When connecting general purpose output block only, refer to subsection "Mounting" ( page 33 ) of section "EX9 Series General Purpose Output Block" in this manual. For branch wiring method, refer to subsection "Wiring" ( page 10 ) of section "EX500" in this manual.

CXT

Bore (mm) QW RW S T W X Y Z CY1 32 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 MY1 Long stroke Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) X Y Z Bore (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 SCXT Tube bore size A, #2(#2+#3) SCXT

Soft Start-up Valve

) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33

ZP

(26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

JXCx-OMY0006

Memory map 33 9.1 Memory allocation 33 (1) Input Area Mapping 33 (2) Input area mapping of upper level device 34 (3) Output area mapping 38 (4) From upper devices to controller (details) 38 10. Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 D-X Individual -X 1393 Series RSG Rod End Configuration: Lever Type with Shock Absorber Basic style: Flange mounting These 2 figures show the piston rod extended.

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

ZQ-OM01301

37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Rotary Table

5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

LEC-OM032xx

Mode.33 10. 1 Outline.33 10. 2 Step data input mode .33 10. 3 Numerical data input mode.33 10. 4 Data writing mode.35 11. Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12.

AIR COMBINATION

242.6 247.1 AC60A-B 28 44.3 27.8 61.3 42.5 80.8 42.5 80.8 242.6 241 237 273.9 241.1 256.6 261.1 Note) The dimension of C is the length when the filter regulator knob is unlocked. 24 to to Standard specifications C E Bracket mount F G Model P1 P2 A B J K M Q1 Q2 R S U V M50.8 AC10B-A 1/16 56 59.9 11 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-B 1/8 83.2 87.6 26.5 41.6 25 28.5 2 30 24 33

Refrigerated Air Dryers Series IDF/IDU

(Refer to How to Order on page 33.) Note 3) Not applicable to the medium air pressure specification. Prepare a bypass piping set suitable for the specification.

MHZ

Finger Position/Narrow Type MHZ2-10N 5.4 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 0 0.4 +2.2 0 When closed 5.7 When open 9.7 12-2-33 33 Series MHZ2 Dimensions MHZ2-16 Double acting/Single acting Basic type 30 16 2-M4 x 0.7 thread depth 4.5 (Mounting thread) +0.025 0 depth 3 3H9 4-M4 x 0.7 thread depth 8 (Mounting thread) Prepared hole

Brake mechanism added

B 20 Ht D-A5/A6 D-A59W D-A3 D-G39/K39 G 1/2 (Applicable cable O.D. 6.8 to 9.6) Hs Hs 49 Ht Ht 56 34 36 A B B 33 A D-A3C D-G39C/K39C D-G5/K59 D-G5W/K59W D-G5BA D-G59F/G5NT G 1/2 (Applicable cable O.D. 6.8 to 9.6) B A HW 49 Hs Hs 24.5 B A 33 36 D-F5/J59 D-F5NT D-F5W/J59W D-F5BA/F59F D-A44 G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs Hs 31.5 Ht Ht 56 A 36 B B 30 A D-A44C G 1/2 (Applicable cable

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Mini Rotary Actuator

Maintenance and Inspection 33 Periodic inspection 33 External stopper assembly procedure 35 Troubleshooting -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13