Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60°C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, HA, VNA/B/C/D

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VAC PAD (BELLOWS) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, 0.03395

JXCx-OMU0024

Refer to section "4.1 (7) Test Drive window" for details. 13 - (1-1-3) Window (W) When Window is selected, a sub window will be displayed. There are two commands available: All Close and Position Init. These commands and the descriptions are shown below. Item Description All Close All of the displayed sub windows will be closed.

SFOD-OMT0012

This means (Off-line) communication between the controller and PC is not established. 13 No.SFOD-OMT0012-A (1-4-2) Operation mode details The available contents of each operation mode are shown in the table below. Description Normal mode Remote Maintenance Wiring, setting and reading of step data and controller parameters. Monitoring of operation and parallel I/O input/output signals.

SFOD-OMT0011CN

1) Version ( -) (1-1-4-2) Language () Current language New ja, Japanese,: language en, English, : 0:(mm):mm Length 1:(inch):inch unit of Measure selection (1-1-4-3) Password 12 No.SFOD-OMT0011CN-A (1-2) View (V) the sub window buttonsStatus TeachingParameterStep DataAlarm Test Drive (1-3) SVON ON/OFF ON OFF SVON: OFF OFF SVON: ON ON (1-4) (1-4-1) JOG I/O I/O ONOFF I/O PC 13

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

MHx-OMY0001

MHM-32D1 *2 *2 *2 51.8 MHM-32D2 19 19 14.5 MHM-50D 27.2 27.2 54.2 1.2 22.7 49.7 3.7 31.5 38 MHM-50D1 *2 *2 *2 66.2 MHM-50D2 27.2 27.2 22.7 -11- *1 1mm *2 A *3 MHM-16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Defleftor Procedure 2 Mount new element Element Buffle Procedure 1 Rotate 90 degrees Procedure 3 Rotate 90 degrees 13 Step 4 Insert the new element assembly into the bowl assembly and rotate 45 degrees in either direction so that the protruded part of the element assembly engages with the recessed part of the bowl assembly.

CLAEAN AIR MODULE CLAEAN AIR MODULE CLAEAN AIR MODULE CLAEAN AIR MODULE LLB Series LLB Series LLB Series LLB Series

export are known and f to another country, assure that all local rules goveming to another country, assure that all local rules goveming to another country, assure that all local rules goveming to another country, assure that all local rules goveming to another country, assure that all local rules goveming to another country, assure that all local rules goveming 4 5 6 7 8 9 10 11 2 5/5 12 13

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

. -13- 6-4.

Profi-E

Speci f i cat i ons I TV1010 I TV1030 I TV1050 I TV2010 I TV2030 I TV2050 I TV2090 M odel I TV3010 I TV3030 I TV3050 M i ni m um suppl y pressure Set pressure + 0. 1M Pa Set pressure 13. 3kPa M axi m um suppl y pressure 0. 2M Pa 1. 0M Pa 1. 0M Pa 101kPa Set pressure range 0. 0050. 1M Pa 0. 0050. 5M Pa 0. 0050. 9M Pa 1. 380kPa Vol t age D CV Pow er source Current consum pt i on A or l ess

CC-Link-E

Speci f i cat i ons I TV1010 I TV1030 I TV1050 I TV2010 I TV2030 I TV2050 I TV2090 M odel I TV3010 I TV3030 I TV3050 M i ni m um suppl y pressure Set pressure + 0. 1M Pa Set pressure 13. 3kPa M axi m um suppl y pressure 0. 2M Pa 1. 0M Pa 1. 0M Pa 101kPa Set pressure range 0. 0050. 1M Pa 0. 0050. 5M Pa 0. 0050. 9M Pa 1. 380kPa Vol t age D CV Pow er source Current consum pt i on A or l ess

DeviceNet-E

Speci f i cat i ons I TV1010 I TV1030 I TV1050 I TV2010 I TV2030 I TV2050 I TV2090 M odel I TV3010 I TV3030 I TV3050 M i ni m um suppl y pressure Set pressure + 0. 1M Pa Set pressure 13. 3kPa M axi m um suppl y pressure 0. 2M Pa 1. 0M Pa 1. 0M Pa 101kPa Set pressure range 0. 0050. 1M Pa 0. 0050. 5M Pa 0. 0050. 9M Pa 1. 380kPa Vol t age D CV Pow er source Current consum pt i on A or l ess

VBA-OM-S002

To mount the air tank on a floor surface, use the four holes of 13 to secure the tank with bolts (order separately) or anchor bolts (supplied with the product). Mount the air tank horizontally. If the tank is mounted vertically, the load will be concentrated on one foot, leading to breakage.

VBA-OM-P019

2 VBA-OM-P019-A VBAT20A1-T-X104VBAT38A1-T-X104 VBAT-M36C / VBA2 4 VBA4 4 /VBAT20A-Y-3 VBA2 4 VBAT20A1-T-X104 VBAT38A1-T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/

VBA-OM-S009

To mount the air tank on a floor surface, use the four holes of 13 to secure the tank with bolts (order separately) or anchor bolts (supplied with the product). Mount the air tank horizontally. If the tank is mounted vertically, the load will be concentrated on one foot, leading to breakage.

VBA-OM-S007

VBA-OM-S007 4 13 ()() OUT () 30 1 1 VBA2 4 VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75

DOC1023894

Push Button POM 1 Red 8 Spring Stainless steel304-WPB 1 9 Push nut Stainless steel304 1 12 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved 13

PSxx-OMF0005CN

No.PS-OMF0005CN-E / / ISA2 2 11 13 14 15 17 18 20 23 26 26 27 -1No.PS-OMF0005CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

EX510-GDN1.eng

DC-DC converter (isolated) Pin #1: Brown wire FG +24 V TD+ TD0 V Power supply for output INPUT OUTPUT +24 V 0 V COM D +24 V 0 V +24 V RD+ RD0 V Power supply for input and controlling GW 2 13 12 Wiring (continued) Press fitting Press the cover to the body with plier etc. Confirmation It is completed with a check on 4 latches engaging. 3 NOTE 1.