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pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC25 Rc 3/8 AC55 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 500 1000 1500 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC30 Rc 3/8 AC60 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa

Failure to follow this procedure can cause damage to the knob and the outlet pressure 0.1 0.1 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 2000 Flow rate L/min (ANR) 0 1000 3000 0 Conditions: Inlet pressure 0.7MPa may fluctuate. Outlet pressure 0.2MPa Pull the pressure regulator knob to unlock.

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)

Lubrication cannot take place under a pressurized condition. 0.02 0 0 2000 4000 6000 8000 Caution Flow rate (/min (ANR)) 1. Check the dripping amount once a day.

NS11-81 5 Port Solenoid Valve Series SV Lateral Plug-In Style Manifold 4 Position Dual 3 Port Valves Available Accomodates Gateway Type Serial Wiring Manifold Option Conforming to IP65/IP67 Manifold Interface Options New Concept Connector Type Manifold Series SV1000/2000/3000/4000 New Concept Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 The use of multi-pin connectors to replace

Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 Flow rate [L/min (ANR)] AC40-D Rc1/2 AC40-06-D Rc3/4 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] AC60-D Rc1 AC50-D Rc1 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure

load [kg] Work load [kg] 2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y

Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal type only) Two 3-port valves built into one body. The 3-port valves on the A and B sides can operate independently. When used as 3-port valves, only half the number of stations is required. Can also be used as a 4-position, 5-port type valve.

2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can

Caution Light/Surge Voltage Suppressor, Electrical Entry Single unit Body Ported Series VFS2000 Base Mounted Series VFS1000/2000/3000 Exchange of pilot valve (Voltage exchange) When changing rated voltage and electrical entry etc., pilot valve assembly can be changed since this is a plug-in type.

VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / / / / / & & & & 1 2 2 3 ( ( ( ( ) ) ) ) 1 1 1 1 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 5 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / DC ( ( ( ( ) ) ) ) 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ISO VG32 IP65 IP67IEC60529 IP65 IP67 (MSDS) [ [ [ [ ] ] ] ] 1 ISO VG32 11 ISO VG32 2 ISO VG32 2 6 No.VQ1000V-OMV0001

4/RJ08 4 4 12 10 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] RJ1007L 3 3 8 RJ0806L RJ0604 2 6 2 4 RJ0806H RJ1007H 1 1 RJ0805 RJ1006 2 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 200 400 600 800 1000 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] Graph !6/RJ14 Graph !8/RJ27 Graph !

3000 Flow rate [L/min (ANR)] 00 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] 0 0 AC60-B Rc1 AC55-B Rc1 AC50-B Rc1 0.6 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 4000 6000 8000 2000 10 0 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow

35C 2000 2000 Heating capacity [W] Heating capacity [W] 1500 1500 Ambient temperature 25C Ambient temperature 25C Ambient temperature 15C 1000 1000 500 500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Pump Capacity (Thermo-con Outlet) HECR002-A When high-pressure pump mounted 0.14 0.10 0.12 Discharge pressure [MPa]

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

Positioning driver Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing LXS Model 15.7 15.7 7.84 Load movement direction a = 1000 2000 a Mep a = 2000 a = 3000 L1 (mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 5 10

L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300 500 600 1000 2000 5 500 500 L type 25.9 mm shorter 92 10 1000 1000 L type 20 2000 2000 L type Series PF2A (Current model) 66.1 Current PF2A: 5 L/min 1 L/min 70 mm shorter Setting resolution 35 90 20 mm shorter 160 CAT.ES100-115A Series PFMC 3-Color Display Digital Flow Switch Series PFMC Clockwise 225