Pressure Range: ISE79S (0 to 50 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE75G (0 to 2 MPa), Piping: N02 (NPT 1/4), Orifice: T (Orifice shipped with the Product), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B)

Pressure Range: ISE78G (0 to 16 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE75G (0 to 2 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: ISE75G (0 to 2 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only), Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate: K (Operation Manual + Calibration Certificate)

Pressure Range: ISE70G (0 to 1 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate: Y (None)

Pressure Range: ISE76G (0 to 5 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only)

Pressure Range: ISE75G (0 to 2 MPa), Piping: N02 (NPT 1/4), Orifice: T (Orifice shipped with the Product), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE76G (0 to 5 MPa), Piping: N02 (NPT 1/4), Orifice: T (Orifice shipped with the Product), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

Pressure Range: ISE70G (0 to 1 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B)

Pressure Range: ISE78G (0 to 16 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only)

Pressure Range: ISE78G (0 to 16 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: T (Orifice shipped with the Product), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Modular Design with Uniform Body Style

Example) AC30C-F03DE1-16NR-D q e r w y t q Body size 20 30 40 Symbol Description w Pipe thread type Nil Rc V V V N*1 NPT V V V F*2 G V V V + 01 1/8 V 02 1/4 V V V e Port size 03 3/8 V V 04 1/2 V 06 3/4 V + Nil Without auto drain V V V a Float type auto drain C*4 N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D*5 N.O.