VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

5 to 60 C Note 1)/?5 to 60 C Note 1) (NBR seal)?5 to 60 C Note 1)/?5 to 99 C Note 1) (FKM seal)0.25 to 0.7 MPa?5 to 50 C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)5.5 MPa?5 to 50 C Note 1)20 times/minVertical upwards3/4?10.6 ?1101/45.6100

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

PF3A7xxH_eng

PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). 4 Snap shot function The current flow rate value can be stored to the switch output ON/OFF set point.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Locations where the ambient temperature is outside the range of the temperature specification (refer to specifications). c. Locations where the ambient humidity is outside the range of the humidity specification (refer to specifications). d. Locations where corrosive gas, flammable gas, seawater, water and steam are present. e.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female

to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Product: MPa, °C; Pressure Gauge: MPa

Fitting: None, Pressure Unit: Product: MPa, °C; Pressure Gauge: MPa

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)