10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING

Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING

Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING

Rotary table, Rack and Pinion type , Size 10, 20, 30, 50, Direct load mounting possible , High precision type available , Auto switch capable, CYL, ROTARY TABLE, ACTUATOR, MSQ ROTARY ACTUATOR W/TABLE, 15, MSQ OTHER SIZE CLEAN ROOM, .77161 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, without switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C, CYL, RODLESS, MAG. COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, ID, 25MM CY3R DOUBLE-ACTING, 2.42508 lb

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.

Auto switches are integrated as standard.Magnetically coupled rodless cylinder , Direct mount type, with switch rail , Bore sizes *: 6, 10, 15, 20, 25, 32, 40, 50, 63 , Maximum operating pressure: 0.7MPa , Ambient temperature: -10 to 60C , Variety of auto switches available, CYL, RODLESS, MAG.