CL

CLQ Lock operation Type Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D MLGP N A Non-lube/Rubber bumper Non-lube/Air cushion RLQ Bore size Cylinder stroke (mm) 20 25 32 40 20 mm 25 mm 32 mm 40 mm With rod boot MLU Bore size (mm) Standard stroke (mm) Long stroke (mm) Without rod boot Nylon tarpaulin Heat resistant tarpaulin 20 Nil J K

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

XLAQ/XLDQ

S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330

Rotary Cylinder Series MRQ Size: 32, 40 1

Load at end of lever Position of rotational axis: Perpendicular to the plate through one end 2 1 2 2 a + K = m1 + m2 3 a Ex.) When shape of W2 is a sphere, refer to u, and 4a + b 2 1 2 4a + b 2 2 2 = m1 + m2 12 12 It becomes K = m2 2r2 5 5. Thin rectangular plate (Rectangular parallelepiped) 10.

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Pressure Sensor Controller

Voltage output 2 Output voltage: 1 to 5 V (within rated pressure range), Output impedance: approx.1 k Linearity: 0.2%F.S. (Without sensor), Response time: 150 ms or less Analogue output Accuracy 0.6%F.S. 1.0%F.S. 1.5%F.S.

PSxx-OMG0001CN

-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H PSE31() PSE30() 2 3 1 (DC(+)) (LINE(+)) (DC(+)) 2 3 (DC(-)) (DC(-)) 4 (OUT15 V) (LINE(-)) (OUT420 mA) A A A -13No.PS-OMG0001CN-H DC+5 OUT1 4 OUT2 3 2 DC-1 M3 mm 0.30.35 Nm PSE3T 3 PSE31T 2 -14No.PS-OMG0001CN-H ZS-28-A PSE30(T) PSE31(T) NPN 2 NPN 2 Max.30 V80 mA 1 V Max.30 V80 mA 1V :15 V 1 k

PFxx-OMJ0005CN

DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214 Nm Rc(NPT)1/8 Rc(NPT)1/4 17 mm G1/8 G1/4 21 mm 1.0 MPa -16No.PF-OMJ0005CN-I FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMJ0005CN-I NPN(2 ) PFM7--ADC(+) OUT1 OUT2 DC(-) Max.28 V80 mA 1 V NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k

Digital Flow Switch (Remote type monitor unit)

Response time 1.5 s (100 ms) Voltage output Output voltage : 1 to 5 VDC Output impedance : 1 k Analogue output Output c urrent : 4 to 20 mA Current output Max. load impedance: 600 (24 VDC) Min. load impedance: 50 Accuracy 1%F.S. max.

PFxx-OMO0004CN

IN(70) IN OUT IN OUT 8cm () Rc1/4NPT1/4 1214 Nm Rc1/4NPT1/4 17 mm G1/4 21 mm -19No.PF-OMO0004CN-E -20No.PF-OMO0004CN-E FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -21No.PF-OMO0004CN-E NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()

PFMB.eng

I Bracket (Mounting hole) K Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Digital Flow Switch (Integrated display type)

to 20 mA) Load impedance Impedance Output impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Analogue output approx. 1 k Accuracy 5%F.S. max.