Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 19 (3/4" or ø19), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P7 (Direction 7), Option 1: 2 (By-pass)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 10 (ø10), Output Tube Size: 11 (3/8), Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 13 (Tubing O.D. 1/2), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 25 (Tubing O.D. 1), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 07 ( Tubing O.D. 1/4), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Body Class: 2 (Orifice Dia. ø4), Valve Type: 0 (N.C.), Applicable Tubing Size: 03 (ø3mm or 1/8"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Body Class: 2 (Orifice Dia. ø4), Valve Type: 0 (N.C.), Applicable Tubing Size: 07 (1/4"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P4 (Position 4), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 11 (3/8), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 2 (Double Acting), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)