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CODE LIST -3-9 3.10 ASCII CODE LIST -3-9 4 TROUBLESHOOTING -4-1 INR-244-831 iii Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch of Thermo-con.

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 / 1 1.5 *3) *3) 1 1 () 3 (1) , (2) (3) (1) (2) (1) (2) (3) 4 (1) , (2) (3) (4) (1) &/(Best Pneumatics No.7) (2) (3) (4) (5) 5 (1) (2)1 ()ISO VG32 1 ISO VG32 1) (1) (2) (3) (4) 6 (1) (2) (3) (4) (5) (1) (1) (2) (3) 7 1-2. (1) (1) (2)PIL PIL1/10 (1) 23 (1) (2)VR21 1.41.6Nm 1.41.6Nm

x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x 1.5 M20 x 1.5 1/4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

Contents Safety Instructions. 2 Outline of clean room specification. 4 Grease used. 4 2 Recommended tube diameter. 4 Raising dust characteristic. 4 21 Recommended tube diameter. 4 22 Amount of vacuum aspiration . 6 How to Order. 7 Construction. 8 1 11-LEF Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and /or equipment damage

Note Hard anodized Kit components CU20A-PS 20 1 Aluminum alloy 1 CU25A-PS 25 1 Hard anodized Aluminum alloy 2 Rod cover/Bearing 13, 14, and 15 CU32A-PS 32 1 Clear chromated Aluminum alloy 3 Head cover 1 Chromated Aluminum alloy 4 Piston 1 Stainless steel 5 Piston rod 1 Phosphate coated Carbon tool steel 6 Snap ring 1 Nickel plated Carbon steel 7 Rod end nut (2) 8 Cushion needle assembly

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Port size Flow characteristics Internal pilot type External pilot type 1(P)4(A) 3(R2)2(B) Body port [dm3/(sbar)] B Cv C C [dm3/(sbar)] B Cv 1/2 12 0.14 2.9 14 0.18 3.4 This is the flow rate when the main valve is fully open. 3. How to order Switching type -5 - 4.

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

F O T I D G 3 7 I D G E L 3 H F O T I D G 3 H1 E N 4 0 0 U l e s e t T u b e c o n n e c t i o n D o r t for purse air e]-!-q-U.!-! a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ?

RY0F H ol d out put pressure 1 Set dependi ng on t he dat a of RY00RY0B 0 Set pressure i m m edi at el y bef ore com m uni cat i on abnorm al i t y Set t i ng w hen f act ory i s shi pped 1 2 1 2 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 OFF OFF OFF OFF OFF OFF OFF OFF OFF OFF ON ON 7 Pressure set t i ng and out put m oni t ori ng Pressure set t i ng can be done by sendi ng i nput dat a usi

JFA connector J4000 series SC02B-J42SK-GHXR 2 24 VDC (1000) 1 RS-485 BUS + 2 RS-232C RD 1 2 3 4 5 3 RS-232C SD 4 RUN/STOP signal input Alarm, RUN/STOP , Communication connector 5 SG 6 Output cutoff alarm (open when alarm occurs) 9 8 7 6 7 Common for output cutoff alarm D-sub 9 pin (socket type) Holding screw: M2.6 8 RUN/STOP signal input 9 RS-485 BUS 8 HEF Series Operation Display Panel

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 4/11 FGX-OM-L007-C / 1 1.5 () 5/11 FGX-OM-L007-C FGD Series FGD , 0.5MPa 4080 oC 40 oC IN/OUT 0.1MPa , U IN/OUT 6/11 FGX-OM-L007-C 1. 1-1. 1 2 (1) 3 (2) 4 (3) (4) 5 (5) 6 (6) 7 (7) 8 (8) 9 (9) (10) (2 FGD*B ) 10 (11) (12) 18 (13) (14) 11 (15) (16) (17

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 3 *3) 1 1.5 3) 1 1 () 4 1 1-1 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1) 2) ( ) 3) 4) / / 2 ,3 ) 2 2 ,3 ) 1) 1 2) 20 ,0.150.6MPa 3) MXQ25(A)-150,MXQ6B-50,75MXQ8B-75,100MXQ16B-100,150MXQ20B-125,150 300mm/s 4) MXQ**B 50200mm/S 1 (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2

For solenoid valve) 23.5 11 A 21 28 44 29 25 36 18 27 34 X 21 14 1 R P 40 4 26 3.5 26 4 48.7 54.2 40.5 34 10 2-4.5 2-M4 X 0.7 55.5 3.6 54.2 (Mounting thread) (Mounting holes) 3-Rc(PT) 8 1 (P, A, R port) 0.8 P R 54.5 1.8 (Bleed port) 16 14.5 20 With filter (80mesh) 1.8 (Bleed port) 12 With filter (80mesh) 23 15 3-Rc(PT) (P, A, R port) , 8 1 4 1 48 3.3-4

2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +0.5 0.3 +2.2 0 +2.2 0 +2.2 0 +2.5 0 MHZ2-10D 5.7 3 M3 x 0.5 M3 x 0.5 M3 x 0.5 11.2 15.2 5.7 9.7 2.5 4 +2.2 0.2 +2.2 0.2 +2.5 0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x

rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise simulation) Noise tolerance Note 3) Fast transient noise: IEC61000-4-4: 1 kV VDW30: 3 W (With 0.5 W power-saving circuit) VDW40: 6.5 W (With 1 W

Unit selection function 1 Switch operation (OUT1) 1: In window comparator mode, the hysteresis is fixed at 3 digits. When setting, allow 7 digits or more between Set point 1 and Set point 2 (Set point 3 and Set point 4). 2: When Set point 1 = Set point 2 (Set point 3 = Set point 4), chattering may occur. Set value is calculated and set.

Fluorine grease 13Class 4 Cleanliness class (ISO class) 12Class 5 Suction Flow Rate of Vacuum Suction Type(Reference values) 5 L/min(ANR) 10 L/min(ANR) Port size M5X0.8 1/8 1/4 5 4.