./ Release Valve N.C., w/out Check Valve), Nozzle Size: 07 (ø0.7), Vacuum Pressure: S (-90 kPa), Exhaust Type: C6 (ø6 One-touch Fitting)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)
Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 03, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: D (DIN Rail Mount Style)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: NR (N + R), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: B (Quick Response Type (0.95W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: DN (D + N), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: DN (D + N), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: DK (D + K), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 0 (Metal Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: Standard Type (0.4W), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: DN (D + N), Voltage: 6 (12VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: N (Negative Common), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: DR (D + R), Voltage: 5 (24VDC), Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)
Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: DN (D + N), Voltage: 5 (24VDC), Manual Override: D (Slide Locking Type, Manual Type), Cylinder Port: C6 (Side Ported ø6 One-touch Fitting)