Metering Valve with Silencer Series ASN2 1 Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.
model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0
175g 170g 1 -31No.EX-OMN0027CN-D EX600-ED2 -32No.EX-OMN0027CN-D EX600-ED2-2 -33No.EX-OMN0027CN-D EX600-ED2-3 -34No.EX-OMN0027CN-D EX600-ED3 EX600-ED3-2 -35No.EX-OMN0027CN-D EX600-ED3-3 -36No.EX-OMN0027CN-D EX600-ED4/ED5 -37No.EX-OMN0027CN-D EX600-ED4/ED5-2 -38No.EX-OMN0027CN-D EX600-ED4/ED5-3 -39No.EX-OMN0027CN-D EX600-EU1 EX600-EU1-2 -40No.EX-OMN0027CN-D EX600-EU1-3 -41No.EX-OMN0027CN-D
LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 209 LEM Series Auto Switch Mounting Auto Switch Proper Mounting Position at Stroke End Detection [mm] D-M9, D-M9mV D-M9mW, D-M9mWV For LEMB Model Nominal size A Operating range LEMB 40 5.5 LEMC 8 3.5 LEMH 10 6 LEMHT 34 7 LEMB 25 40 5.5 LEMC 8.4 4 LEMH 5.5 LEMHT 5.5 32 A Note) The operating range is a guideline including hysteresis, not meant to
Applicable bore size (mm) D B1 C d H1 Part no.
Form (mm) G H UX UZ M N D (g6) Size 20 30 40 8 21 50 65 15 10 11 75 18 12 10 24 57 13 84 20 15 11 27 64 15 2.
Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN Data D-P5DWL is available for 40 to 100. In addition to the models in the above table, there are some other auto switches that are applicable.
D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75
Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPH(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2 x n1)-5.5, Drill through 11.5, counter bore depth 5 2 5 14.8 21.5 thread depth 4 4-M2 x 0.4 12 (Groove depth 1) 5 Section AA (Sensor mounting dimensions) (20.5) Stroke + 66 (Table movement range) 82.5 PCD3 40 40 2 x n2
X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.
(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket
OIl-Delay time 200 +/50mS Series CD5 Auto Switches D-A64 D-A59W D-853, A53 Reed Type Internal Circuit ~"e C) t ~R.o Reed sWltch Luminous diode Z"'" diode Zener dtlXle Surge absOtber D-A54, D-A44 D-A67 Reed sw~ch Zener dlode Indicator light I Operation R., ON Black (+) OperaUng (-) "'"!
(0.9) P. 10-16-14 D-Z73, D-Z76, D-Z80 D-Y59A/Y69A, D-Y59B/Y69B, D-Y7P/Y7PV D-Y7NW, D-Y7NWV, D-Y7PW/Y7PWV, D-Y7BW/Y7BWV Auto switch specifications Reed switch Solid state switch 10-16-1 2 Series MVGQ Valve Mounted Cylinder Precautions Be sure to read before handling.
Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)
B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.
D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5
Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64
Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)