Digital Flow Switch ( compatible)

. -98No.PF-OMZ0002-A Dimensions PF2MC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PF2MC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PF2MC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PF2MC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions Symbol Model S T U V W PF2MC7501/7102 24 22 32 40 50 PF2MC7202 30 30 42 48 58 -99No.PF-OMZ0002

Digital Flow Switch ( compatible)

. -94No.PF-OMY0002 Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -95No.PF-OMY0002 Lead

PF3A7xxH.eng

Port size Width across flats of attachment 3 DC(-) Piping port (OUT side) Hysteresis H 1 45 mm 4 OUT OUT set value PL(nL), PH(nH) Window comparator mode 1 1/2 60 mm Hysteresis WH x Element Description 2 70 mm Display See below. Key-lock function (1) Press the S button for 5 seconds or longer in measurement mode. When [oPE] is displayed on the main display, release the button.

PF3A7xxH-L.eng

Configurable items Sub display (left) Snap shot function FUNC DC(+) 2 1 Body Body Hysteresis OUT set value H_1, H_2 P_1 (n_1), P_2 (n_2) Hysteresis mode Port size Width across flats of attachment Piping port (OUT side) 3 4 DC(-) OUT (C/Q) P1L (n1L), P1H (n1H) P2L (n2L), P2H (n2H) 1 45 mm OUT set value Set value P_1 Window comparator mode 1 1/2 60 mm Hysteresis H_1 Hysteresis WH1, WH2 x 2 70

Digital Flow Switch (Remote type monitor unit)

analogue output 47 F30 Storing of accumulated flow 49 F80 Setting of power saving mode 50 F81 Setting of security code 51 F82 Input of line names 52 F90 Setting of all functions 53 F96 Input value check 54 F97 Selection of copy function 55 F98 Output check 58 F99 Reset to the default settings 59 Other Settings 60 Maintenance 63 Troubleshooting 64 Specifications 67 Characteristics graph 70

Process Pump

The result is approximately 70 L/min (ANR). 13 Selection from Viscosity Characteristic Graph Required specification example: Find the pilot air pressure for a discharge rate of 2.7 L/min, discharge pressure of 0.25 MPa and a viscosity of 100 mPas. Selection procedures: 1.

AXTS-OMY0007

AXTS040*-2B-X2 Internal pilot valve Ratio of operating frequency and ON time AXTS040*-2(B)-X2 ON OFF adjustment OFF[] 10 needle [rotation] Frequency [Hz] 1 3 5 7 7 5 3 1 8 2.1 Hz 2.6 Hz 3.1 Hz 3.8 Hz 1 [Hz] 31% 64% 74% 73% 6 2.6 Hz 3.0 Hz 3.4 Hz 4.2 Hz ON adjustme nt [Rotation] 3 4 Number of rotation of ON adjustment needle 19% 60% 72% 71% OFF ON [] 2.6 Hz 3.0 Hz 3.5 Hz 4.4 Hz 2 5 21% 61% 70%

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids

HEC-OM-S019

Main functions Auto tuning, Off set function, Temperature sensor fine control function, Upper / lower temperature limit alarm function, Output shut off alarm, Serial communication Temp: 0 to 40 C Humidity : 35 to 85%RH Altitude : up to 1000m Environment : No corrosive gas, solvent such as thinner and flammable gas Temp :-40 to 70 C (No dew condensation and icing) Humidity : 5 to 95%RH Environment

XL-OMV0005

Suffix symbol for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLGR Series

Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

Pressure Sensor for General Fluids

(at 25 oC) Enclosure IP65 Withstand voltage 500 VAC, 1 minute, Between lead block and case Insulation resistance 100 M or more at 500 VDC Between lead block and case Environ mental Operating temperature range Operation: -10 to 60 oC, Storage: -20 to 70 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard CE, RoHS Piping specifications

Pressure Sensor for General Fluids

(at 25 oC) Enclosure IP65 Withstand voltage 500 VAC, 1 minute, Between lead block and case Insulation resistance 100 M or more (at 500 VDC) Between lead block and case Environ mental Operating temperature range Operation: -10 to 60 oC, Storage: -20 to 70 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard CE marked (EMC directive

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.

CM2x-OM0230Q

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 50~750 mm/s () 2. 2-1. AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1.

CG1-OM0227

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10+70-10+60 +1.4mm 1000st 0 +1.8mm 1500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P9, [2-6.]) () 2. 2-1.

AIR CYLINDER

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

CG1x-OM0006N

-2- / *3) 1 1.5 3) 1 1 () -3- 1.5 3 NBR ,, , FKM <> <> CG1 4 - GR-R-010(10g) CG5-S 542 50 2040 2 50 5 - 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 +1.4mm 11000st 0 +1.8mm 10011500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P14, [2-6-3.]) 1 () 2 6 2. 2-1.

Cylinder with lock

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Double acting/single rod Operating method Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure 0.08MPa Min. operating pressure Without auto switch: -10 to 70 With auto switch -10 to 60 Ambient and fluid temperature Operating fluid temperature Not required (non-lube) Lubrication 50~1,000mm/s * Piston speed Allowable stroke

CE

20 3263 2 1 0.8 JIS B0209 3-2 76 *1 23 14.5mT DC12VDC24V(10) 1 40mA 0.1mmCEU5 *2 (20) 0.2mm Max DC24V,40mA A /B DC500V50M12E 33.3Hz 6.8G X,Y 2 Z 4 JIS D1601 30G X,Y,Z 3 *3 IP-65(IEC60529 *1)SMC CEU5 *2)CEU5 *3) 3-3 3-3-1 J mm 12 20 32 40 50 63 E 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70