EXxx-OML0010CN

I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

LFE-OMZ0012

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

High Vacuum L Type Valve

The maximum operating 0 5 10 15 20 25 30 ( temperature for the valve is 150oC. If the heater temperature is over 200oC or valve temperature is Time (sec.) Duration of the inrush current flow (as a guide) over 150oC, please use thermostat to control the heaters to prevent overheating.

XL-OMY0001

40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15

FGD-C

(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

IP80-OM00019

(1) (2) (3) (4) (5) (6) OUT1 (1)OUT1OUT2 (2)+(3) (4)/ () (5)IP8000(2) (6)IP8100(3) 15 7-1 5 O K O O K K (1) 0% (4mAD (1) 0% (4mAD C) C) (2) 100%(20 (2) 100%(2 mADC) 0mADC) (3) 0%(1) (3) 0%(1) (4) (4) 16 7-2 / () mADC 17 18 18OUT1OUT2A 1718 ( 1/16-1 ) 11-1(/) 7-3 A 1M1/8OUT117 1/8 1/81/4 2A(17) SUPOUT1 A 17 8.

K35-OMX0029

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

PSxx-OMS0004CN

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

MHx-OMU0057

6. 7. 11 - 3-2. 1025 Nm 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 Assy O O O NC () NO O C Assy Assy 12 - 32,40 Assy Nm 32 3 1.37 40 4 2.84 Nm 32 2 1.37 40 2.5 2.84 NC () Assy NO O C 13 - 3-3.Assy 1025 (1)Assy 2 (2),0.2mm , , () Nm 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15

MHx-OMM0057

MH*-OMM0057 MHL2-10D* MHL2-16D* MHL2-20D* MHL2-25D* MHL2-32D* MHL2-40D* 1. 23 2. 4 3. 3-1 5 3-2 5 3-3 5 3-4 67 3-5 8 3-6 9 3-7 1012 3-8 13 4. 4-1 13 4-2 14 4-3 15 4-4 16 1 - *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

MA

(Series MA3 only) (Series MA3 only) Rotary actuated type MHR2-10 15 Refer to AHC system Series MA. 12-12-17

AME

15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 AME450SAME, #4 AME550SAME, #5 AME650SAME, #6 AME850SAME, #7 4.6-26

AMF

15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME, #4 AMF550SAME, #5 AMF650SAME, #6 AMF850SAME, #7 4.6-32 Series AMF Precautions Dimensions: AMF801/901/800/900/1000 AMF801/901 Be sure to read before handling.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No. Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

VT307

Note 1) Tighten within the tightening torque of 0.5 Nm 15%. Note 2) Connector orientation can be changed by 180 degrees depending on how to assemble the housing (2) and the terminal block (3). VZ Applicable cable O.D.

VT325

Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a It is possible to wire even in the state of bare wire.

VFRA3000

14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position Pressure center 1.2 1/8 Note) ( ): Normal position 5-3-23 6 Series VFRA4000 Dimensions 03 04 2 position single: VFRA411103 04 2 position double

VSA4

13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440

VQC

A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.