Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430

Process Pump <Fluororesin Type> Series PA3000

) Discharge pressure (MPa) 0.4 Discharge pressure (MPa) 0.3 SUP = 0.5MPa SUP = 0.5MPa 0.3 0.4MPa SUP = 0.5MPa 0.3 0.4MPa 0.2 0.3MPa 0.4MPa 0.2 0.3MPa 0.2 0.3MPa 0.2MPa 0.2MPa 0.1 0.1 0.1 0.2MPa 00 2 4 6 8 10 00 5 10 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PA3313-m03: Flow rate characteristics (10Hz)* PA3310-m03: Air consumption PA3313-m03: Air consumption 0.4 14 150

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 15 1000 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 25 12-CY3B25 (Both sides) Non-lube 32 12-CY3B32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Process Pump

SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3

AUTO-SWITCH, ApplicationCXT 12toCXT 25CXT 32No. Auto switch of auto model switches mounted12D-M915151010

Bearing Style: A (High Precision Type), Size: 50 mm, Shock Absorber: H (For High Energy), Port Location: 2 (Standard 180°), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Size: 10mm, Cushion: A (Cushion Pad), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Precision: B (Basic), Size: 70, Suffix: R (Shock Absorbers), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Type: B (Basic Type), Size: 3, Port Location: Side Port, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Size: 30mm, Cushion: A (Cushion Pad), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Type: B (Basic Type), Size: 7, Port Location: Side Port, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing Style: A (High Precision Type), Size: 20 mm, Shock Absorber: L (For Low Energy), Port Location: 3 (Standard 90°), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Type: B (Basic Type), Size: 2, Port Location: Side Port, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Precision: B (Basic), Size: 70, Suffix: A (Adjuster Bolt), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Precision: B (Basic), Size: 200, Suffix: R (Shock Absorbers), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Model: MSQ, Precision: B (Basic), Size: 100, Suffix: R (Shock Absorbers), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)