Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

CE2

side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

REA/REB

Horizontal Operation (Wall mounting) 50 30 REAL40 REAL40 20 Load weight W (kg) REAL32 10 (13.6) REAL25 Bore size (mm) Allowable load weight WA (kg) 15.0 8.9 + 2Lo REAL20 Lo: Distance from mounting surface to load center of gravity (cm) REAL15 10 5 4 45.5 11.3 + 2Lo 15 REAL10 3 101 13.6 + 2Lo 20 2 180 15.2 + 2Lo 25 330 18.9 + 2Lo 1 32 0 500 (650) 750 1000 1500 624 22.5 + 2Lo 40 Cylinder stroke

REC

There may be the case it will vary substantially depending on an ambient environment. 32 30.5 33 68 78 33.5 40 35 37.5 72.5 82.5 38 10-2-101 15 Series REC Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted Auto switch model 2 1 n Different sides Same side Different sides Same side D-C7 D-C80 10 15 50 50 + 45 (n 2) (n 2) 2 15 + 45 ( ) D-H7 D-H7W D-H7BAL D-H7NF (n =

C95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Table of Contents

Theoretical Output (N) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.7 0.5 0.3 Made to Order Specifications (For details, refer to P.43.) 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN Symbol Specifications 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN -XB6 Heat resistant (150C) 141 101 60.3 201 OUT -XB7 Cold resistant (40C) 16 6 121

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

CXS

Theoretical Output 20(N) Data Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Bore size (mm) Allowable load weight (WA) (kg) 6.48 6.8 + 2Lo Lo: Distance from mounting surface to load center of gravity (cm) 6 50 15.0 8.9 + 2Lo 10 30 45.5 11.3 + 2Lo 15 CY1L40 CY1L40 20 Load weight (kg) 101 13.6 + 2Lo CY1L32 CY1L32 20 10 (13.6) 180 15.2 + 2Lo CY1L25 CY1L25 25 CY1L20 CY1L20 330 18.9 + 2Lo CY1L15 CY1L15 32 5 4 624 22.5 + 2Lo 40 CY1L10 CY1L10 3 3.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque [Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

MXF

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121 101

MXH

Standard stroke (mm) Bore size (mm) Data -XC79 Machining tapped hole, drilled hole and pin hole additionally. 6, 10, 16, 20 5, 10, 15, 20, 25, 30, 40, 50, 60 Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Operating direction Rod size (mm) 0.3 0.5 0.7 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN 141 101

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

www.stevenengineering.com Reed switch (2-wire, 3-wire) Solid state switch (2-wire, 3-wire) 2-color indication solid state switch (2-wire, 3-wire) Auto switch CX +1 0 mm Stroke length tolerance DMXP16 Theoretical Output -X (N) 20Operating pressure (MPa) Piston area (mm2) 0.2 Bore size (mm) 0.3 0.4 0.5 0.6 0.7 Data 6 28 6 8 11 14 17 20 10 79 16 24 32 40 47 55 12 113 23 34 45 57 68 79 16 201 40 60 80 101

10-my1h-e

.: GR-S-010 (10 g) 101

(Or None in the Case of No Switch), Made-to-Order: X10 [Long Stroke (101 to 200mm)], Port Thread: -