Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Air cylinder (Series compatible with secondary batteries)

(Page 9) 6 Bushing (bearing) 1000 fR[N] 100 Lateral load applied to rod end 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig. 1 Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

Parallel Type Air Gripper

Specifications 1-1 Specifications Specifications Model MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Cylinder inside diameter (mm) 10 16 20 25 32 40 Fluid Air Double acting: D 0.2 to 0.7 0.1 to 0.7 Operating pressure (Mpa) Normally open: S 0.35 to 0.7 0.25 to 0.7 Normally Single acting closed: C Ambient and fluid temperature (oC) 10 to 60 Repeatability (mm) +/-0.01 +/-0.02 Maximum operating

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

3 Port Solenoid Valve Series SYJ300/500/700

Specifications Fluid Air Operating pressure range MPa 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time ms (at 0.5 MPa) Note 1) 10 to 50 (No freezing.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

IDX-OM-V020

IDFA60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V020 Chapter 9 Option C 9.2 Precautions for installation and handling IDFA60/70/80/90 Series 9-2 IDX-OM-V020 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

AC Servo Motor Driver (Pulse input type)

L A B C Series Equivalent Lead (Including pulley 5(2.86) 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Copper-free Actuators

Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA D SCNAl Standard 20-C(D)NA 3.3-1 -X End lock cylinder Series C(D)B 20Standard 20-CBM2 SCBM2l 3.4-4 Standard 20-CBA1 SCBA1l 3.4-12 Plate

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Nil Nil Without auto switch c 20S 1 pc.

Table of Contents - Tubing

I.D. 435 4 6 8 10 12 TFU0425-2-Length per roll-10-X4 TFU0604-2-Length per roll-10-X4 TFU0805-2-Length per roll-10-X4 TFU1065-2-Length per roll-10-X4 TFU1208-2-Length per roll-10-X4 2 to 8 2 to 8 2 to 6 2 to 3 2 to 3 2.5 4 5 6.5 8 290 Max. operating pressure 145 0 4 32 68 104 140 W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) Operating temperature F Reel

Series CE1

Materials: 12, 20 Steel 32 to 63 Rolled steel 30 d (mm) Bore (mm) D C H d B C D Part No.

AC Servo Motor Driver (MECHATROLINK-III type)

L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

MHx-OMU0057

20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20