Plug-in/Plug Lead: Single Unit

(B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (

Rotary Table/Rack & Pinion Style Series MSQ

1 1 1 1 12 12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Speed Controller: Standard Type Series AS In-line Type

NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 R 1/4 17 18 19.5 7 27.2 40.7 18 1.5 36.7 17.5 AS320-N02-ST NPT 1/4 NPT 1/4 AS320-F02-ST G 1/4 AS320-02-ST Rc 1/4 R 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 19 22.5 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 R 3/8 24.3 9.5 30 53.7 20.8 1.5 47.4 19 22.5 AS420-N04-ST NPT 1/2 NPT 1/2 AS420-F04-ST G 1/2 AS420-04-ST Rc 1/2 R 1/2 24

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

High-Precision Digital Pressure Switch

. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 28 ZSE20(F)/ISE20 Series Function Details Display examples of the main and sub (set value) screens of each mode.

IDX-OM-W010

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of auto drain strainer . 4 2 4 2 4 Replacement of bowl assembly . 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 Table of Contents 1 Air Dryer Table of Contents Chapter 6

Table of Contents

4, !5, !6 Seal kit includes !4, !5, !6.

Vacuum Unit Ejector / Vacuum Pump System

Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

MHY2/MHW2

4 !5 !

V

B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5 13.8 5.5 ZP32U U32 32 35 4 15 10 14.5 4.5 ZP13B B13 13 15 4 13 14.2 18.5 8.7 19 7.5 ZP40U U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15

Digital Gap Checker

Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 ISA3-mmm-mmmB-LNm ISA3-mmm-mmmB-RNm 44.6 L1 L1 44.6 52.5 30 52.5 30 64.5 H 90.1 115.9 64.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Unit: mm Stations 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 *: Bracket mounting only *1: Conforming to ISO16030 *2: Conforming to

Clean Gas Filter

pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1

EXxx-OMN0027CN

() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D EX600-ED2EX600

JXCx-OMU0004

OUT03 ON IN3 ON OFF [6] OUT03 ON IN0 bit_3 ON1 (2) RESET ON OFF [7] BUSY ON OUT03 STOP ON OFF OFF [8] BUSY ON IN0 OFF [9] BUSY OFFOUT 0 OUT0 ON OFF ON bit_0 [10] 2 1 OFF ON OUT1 bit_1 OUT2 ON OFF bit_2 OUT3 ON OFF bit_3 OFF ON BUSY OFF ON ALARM 0 46 No.JXC-OMU0004-A 9.2 .3435 53 97 No.3 NO.3 No.4 NO.4 No.4 (1) NO.4 (2) No.5 No.5 NO.5 NO.5 (3) (1) 3 4 9 7 (2) 4 3 5

Hand Valve Series VH 1

x 1.25 73 M8 x 1.25 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc 1/4 13.5 4-Rc 1/4, 3/8 VH32-02/03 (Bottom ported) 2 (A) 44 3 (R) 1 (P) 4-Rc 1/4, 3/8 4 (B) 5-8-10 5 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle type ( ): Long handle type 4 (B) 2 (A) 4 (B) 2 (A) 25 (32) 25 (32) 1 (P) 3 (R) 1 (P) 3 (R) SA 102 88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 Courtesy

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

MY1

C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 GMY20 GMY16 GMY25 GMY32 MYB20-15-A7164 MYB16-15-A7163 RCS-8 RCS-10 P16 P12 TMY-25 TMY-32 5.1 x 3 x 1.05 4 x 1.8 x 1.1 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 7 x 4 x 1.5 7 x 4 x 1.5 C-6 C-7 MYMK-20-stroke Side seal assembly Polyurethane MYMK-16-stroke MYMK-40-stroke MYMK-25-stroke MYMK-32-stroke Note) Two types

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Qty. 1 1 2 2 2 2 4 2 !4 !

EXxx-OMS0026CN

07 Byte1 byte1 07 Byte2 byte2 815 SEN3(1) Byte3 byte3 1623 Byte4 2431 Byte5 Padding 4 byte 6 byte -59No.EX-OMS0026CN <2> 0 1 2 3 4 5 AXA DYB DYB DXB DXD SEN3 SI 4 byte 1 byte 2 byte 1 byte 1 byte 4 byte (0)(EX600-AXA)4 byte (3)(EX600-DYB)1 byte (4)(EX600-DYD): 2 byte (1)(EX600-DYB)1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0

EXxx-OMU0020CN

GSD EX245-SPN1 GSD STEP 7 HW ConfigOptionInstall GSD file . 4-2 Install GSD file BrowseEX245-SPN1 GSD . 4-3 GSD 23 No.EX-OMU0020CN 4.3.2. Device Name HW ConfigPLCEthernetEdit Ethernet Node . 4-4 Edit Ethernet Node EX245-SPN1 MAC BrowseDevice name . 4-5 Device name LLDP SI Device name 24 No.EX-OMU0020CN 4.3.3.