sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?
Name Material Remarks 1 Body Aluminum 2 Adapter plate Aluminum 3 Spool Special stainless steel 4 Sleeve Special stainless steel 5 Gasket H-NBR 6 Flange Aluminum 7 O-ring H-NBR 8 Spring pin Carbon steel 9 Bolt Carbon steel Not in 2 circuit model 10 Bolt Carbon steel 11 Retaining ring Carbon steel 12 Radial bearing Allowable leakage according to differential pressure 6000 MQR12 Port-to-port
Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'Z) Supply Output Flow Rate 8.8 SCFM (250 Nl/min) at 70 psi (5 kgf/cm':) Supply Ambient Temperature and Temperature of Working Air 14" 140"F (-10 60"C) Range of Angular Adjustment 0'-90'CW or 0"-90" CCW (adjustable range 0 -60 to 0q95') Port Size 1/4" (all ports) Raw lvlaterial of l\4ain Parts Aluminum Die-cast, Stainless Steel, Brass, Nitrile
(mm) 4 4 6 8 10 10 12 12 Tubing I.D. (mm) 2 4 6 10 2.5 7.5 8 9 Color Symbol N Translucent R Red (Translucent) BU Blue (Translucent) B Black (Opaque) Inch nominal size Inch nominal size 5/32" 5/16" Specifications Air, Water Note 1), Inert gas Note 4) Fluid How to measure the minimum bending radius.
Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 29.92 lb
Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 37.01000 lb
Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Adapter, VACUUM PAD, ZP, ZP2, ZP3, 0.00000 lb
Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Adapter, VACUUM PAD, ZP, ZP2, ZP3