Please consult with SMC representative for accurate lead times*** Orifice diameters: ø4 ; Flow characteristics: 0.3 Cv ; Operating pressure: 0 to 0.5 MPa ; Fluid temperature: 0 to 100° C ; Ambient temperature: 0 to 60° C ; Tubing O.D.: Metric size (mm) – 3, 4, 6; Inch size – 1/8", 3/16", 1/4"
Series TIL high purity fluoropolymer tubing is available as standard in inch sizes of 50' and 100' rolls. The TIL series has outstanding corrosion resistance, compatible with chemicals such as acids, bases and ultrapure water. The TIL series is also compatible with maximum fluid temperatures of up to 200°C.
Cooling capacities: 1.3 kW, 1.9 kW, 2.4 kW, 3.2 kW, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping
.: 1/8" to 1/2"; Operating temperature: -40 to 100 °C for air and 0 to 50 °C for water; Colours: black and white.
Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.
Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.
Cooling capacities: 1.3 kW, 1.9 kW, 2.4 kW, 3.2 kW, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping
Cooling capacity: 230W, 600W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.03°C or better depending on load stability ; Power supply requirement: single phase 100 ~ 240 VAC, 50/60Hz ; Circulating fluid: Clear water ; Standards: CE, UL, RoHS
Cooling capacity: 140 W, 320 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.03°C or better depending on load stability ; Power supply requirement: single phase 100 ~ 240 VAC, 50/60Hz ; Circulating fluid: Clear water or 20% ethylene glycol ; Standards: CE, UL, RoHS
UL certified for use in North America; 60 Hz operation; Max. inlet air temperature: 122°F (50°C); Max. flow at rated conditions: 300 scfm 510m³/hr (ANR) @37°F (3°C) PDP; Connections: NPT threads are standard; R/Rc adapters are available
Air pressure applied to pilot port shifts opens piston-coupled valve; Numerous maintenance parts available to extend useful life of valve; Standard FKM seals, plus 8 additional seal compound options; Auto switches mountable from 4-directions; Optional 100°C to 150°C heaters (UL compliant lead wire)
A low sputtering yield and the absence of heavy metals avoid wafer contamination Air pressure applied to pilot port shifts piston-coupled valve; Numerous maintenance parts available to extend useful life of valve; Standard FKM seals, plus 8 additional seal compound options; Auto switches mountable from 4 directions; Optional 100°C and 150°C heaters (UL compliant lead wire)
Air pressure applied to pilot port shifts piston-coupled valve; Replaceable bellows reduces maintenance cost and waste material; Additional maintenance parts available to extend useful life of valve; Standard FKM seals, plus 8 additional seal compound options; Auto switches mountable from 4 directions; Optional 100°C and 150°C heaters (UL compliant lead wire)
Air pressure applied to pilot port shifts piston-coupled valve; Numerous maintenance parts available to extend useful life of valve; Standard FKM seals, plus 8 additional seal compound options; Auto switches mountable from 4 directions; Optional 100°C and 150°C heaters (UL compliant lead wire)
Air pressure applied to pilot port shifts piston-coupled valve; Replaceable bellows reduces maintenance cost and waste material; Additional maintenance parts available to extend useful life of valve; Standard FKM seals, plus 8 additional seal compound options; Auto switches mountable from 4 directions; Optional 100°C and 150°C heaters (UL compliant lead wire)
Please consult with SMC representative for accurate lead times*** Orifice diameters: ø4, ø8, ø10, ø16, ø22; Flow characteristics: 0.35 to 8 Cv; Operating pressure: 0.3 to 0.5 MPa; Fluid temperature: 0 to 100° C; Ambient temperature: 0 to 60° C; Tubing O.D.: Metric size – 6, 10, 12, 19, 25; Inch size – 1/4", 3/8", 1/2", 3/4", 1"
Please consult with SMC representative for accurate lead times*** Orifice diameters: ø4 ; Flow characteristics: 0.3 Cv ; Operating pressure: 0 to 0.5 MPa ; Fluid temperature: 0 to 100° C ; Ambient temperature: 0 to 60° C ; Tubing O.D.: Metric size (mm) – 3, 4, 6; Inch size – 1/8", 3/16", 1/4"
.: Ø 4 to Ø 12 mm; Operating temperature: -40 to 100 °C for air and 0 to 70 °C for water.
.: Ø 4 to Ø 12 mm; Operating temperature: -20 to 200 °C for air and 0 to 100 °C for water.
.: 1/8" to 1/2"; Operating temperature: -40 to 100 °C for air and 0 to 50 °C for water; Colours: black and white.