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Mounting screws Panel Pressure Setting Troubleshooting Front protective cover (Model: ZS-27-01) DC(+) Brown5 OUT1 Black4 Warning Error Indication Manual setting Manually select a set value for the controller. OUT2 White3 Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result.

ZS-27-01 Front protective cover -11No.PF-OMJ0018-F Summary of Product parts Front Item Description Displays the flow value, setting mode, and error indication. Four display modes can be selected: display always in red or green, or display changing from green to red, or red to green, according to the output status (OUT1). LCD Display Indicates the output status of OUT1.

mode lower side set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00 01

Wind mode lower side set value 12 Wind mode upper side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00 01

PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H

ZS-27-01 Front protective cover -11No.PF-OMN0005-E Summary of Product parts Front Item Description Displays the flow value, setting mode, and error indication. Four display modes can be selected: display always in red or green, or display changing from green to red, or red to green, according to the output status (OUT1).

side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -83No.PF-OMX0002-B [Line name communication data] Value (16 hex 00 01

side set value 13 Wind mode hysteresis OUT2 14 Accumulated output mode 15 Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode (Refer to page 13) 22 Option display Line name, not displayed -48No.PF-OMX0007-A [Line name communication data] Value (16 hex 00 01

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01

Function selection mode ON OFF Front protective cover (Model: ZS-27-01) Connector Connecting / Disconnecting When mounting the connector, insert it straight into the socket, holding the lever and connector body, and push the connector until the lever hooks into the housing, and locks.

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 12 How to Order P B 1 3 1 3 A S Female thread / Tube extension P B 1 3 1 3 A S With nut Port size Material of diaphragm Symbol Main fluid Pilot air Symbol Material of diaphragm connection size connection size Female thread 1 PTFE 01 Rc 1/8 N01 NPT 1/8 F01 G 1/8 Actuation Tube extension Symbol

Example 1) ASCII mode Received function code: 04(0 0100)ASCII code 30h34h Abnormal function code: 84(1000 0100)ASCII code 38h34h Example 2) RTU mode Received function code:04 (0 0100) Abnormal function code:84 (1000 0100) 2) Error Code Assign error code below. 01: Function code of a command is outside the standard. 02: The specified address of register is outside the range. 03: Data field

Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :

Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :

Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :

relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01

PA13 Selection of command input pulse form Pulse train form Forward rotation command Reverse rotation command Setting Forward rotation pulse train Reverse rotation pulse train PP 00 NP Positive logic PP Signed pulse train 01 NP L H PP A-phase pulse train B-phase pulse train 02 NP PP Forward rotation pulse train Reverse rotation pulse train 10 NP PP Negative logic Signed pulse train 11 L H

Nm mm MHL2-10D M4X0.7 1.4 5 MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01

Alarm group Servo ON Return to the origin Operation restart condition completion condition procedure Alarm group B No change No change Input RESET Alarm group C No change No change Input RESET Alarm group D OFF No change Note) Input RESET Note) Alarm group E OFF OFF Power supply for control is turned off Supply again *After the absolute encoder ID mismatch error (01-153) alarm is generated

Servo ON Return to the condition origin completion Operation restart procedure Alarm group condition Alarm group B No change No change Input RESET Alarm group C No change No change Input RESET Alarm group D OFF No change Note) Input RESET Note) Alarm group E OFF OFF Power supply for control is turned off Supply again *After the absolute encoder ID mismatch error (01-153) alarm is generated