G15/G27

G27 21 (Width across flats) How to Order G 10 01 15 Option Connection thread Symbol Specifications Size R 1/8: M5 (Female thread) R 1/16 Symbol Pressure gauge 01 (1) Nil X30 Both MPa and psi R1 (2) X201 M5 (Female thread) only Size Note 1) Both R1/8 and M5 (female thread) in case of G15 type Note 2) Compatible with G27 type only Note 1) X3 (Wetted parts SUS) specifications are not available

Precision Clean Regulator SRP Series

SRP1-M5 SRP1-01 Pressure gauge part no.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications For Air For Water For Oil For Steam Dimensions Construction VXK 2 21 01 VXK 2 21 01 1 G 0 0 1 G R 1 5 AC DC Model Refer to the Table (1) shown below for availability. Bracket Orifice size Refer to the Table (1) shown below for availability.

E-P HYREG ® VY1 Series

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

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(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

Pressure Switch/Reed Switch Type

The pressure switch can be mounted on the AC40m-06 and above and the AW40m-06 by screwing the IS10-01 into the piping adapter E500-m06-X051 or E600-m06-X501 to E600-m10-X501 (Rc1/8 threaded on top surface). Products with a premounted switch are available as a special order. Please contact SMC beforehand. Note 1) R position Left Note 1) For thread type: NPT only.

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

VEX-OMY0001

02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1

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Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Digital Flow Switch Series PFA For Air Series PFW For Water

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Class 3 Class 2 Symbol 01 02 03 04 06 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Class 3 Class 4 Class 2 Orifice diameter 2mm 3mm 4mm 5mm 7mm 10mm Symbol 2 3 4 5 7 10 Electrical entry CConduit GGrommet Refer to the table below for orifice and port size combinations.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

How to Order VR 12 1 06 0 F Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 2 1/8 standard 1/4 standard 23 04 06 08 10 01 03 07 09 11 3.2 4 6 8 10 1/8" 5/32" 1/4" 5/16" 3/8" With One-touch fitting Use 1/8" tubing for 3.2. 1 Series VR120F Application Circuit Examples Self holding circuit 1. When "A" is turned ON, output goes ON. 2.