XL-OMY0003

R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R R Kalrez Greene, Tweed Technologies, Inc.

XMC/XYC Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 3.

XMD/XYD Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 6 XL-OMP0003-A 3.

XMH/XYH Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 5 XM-OMP0005-A 3.

MHx-OMM0057

R R 1. 2. 3.

DOC1023125

Accessories Table spacerParallel motor only Model Part name QTY EQFS25(L/R) Table spacer 1 EQFS32(L/R) EQFS40(L/R) Optional parts (sold separately) Power supply cable Parallel I/O cable Communication cable USB cable Setup software Refer to 9 Optional parts (sold separately) for details of optional parts. 28 - Installation and Initial Setting .

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

SMC Wireless System EtherNet/IP ® compatible

R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

AMX-OM-D023-D

R 1/4 12-14 R 3/8 22-24 (Refer to tightening torque in the table on the right). R 1/2 28-30 Do not use a pipe wrench or pliers. They may break the R 3/4 28-30 R 1 36-38 product.

XLF Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.

Lock unit

Unlocked condition can be held in reversed order of Fig. 8. of the release bolt 3240 3 5063 4 80100 5 16 - W a r n i n g (1) Do not operate the release bolt until safety is confirmed.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

XLG Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.

XMA/XYA Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 3.

rep-filter-e

Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e. Since PTFE is used for the material of gasket w, a large force is required to tighten clamp ring t.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

R.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

AMF

For notes e and r, refer to the left. 4B/6B 870 M20 X l 500 AMF1000 e Even if its deodorization performance has not decreased, the replacement interval for the element is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first. r When the element has reached its replacement interval, replace it immediately with a new element.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge