Pressure Control Equipment

Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

5 !6 !7 !8 !

ZSM1-115/121

CD-P11) with inductive loads or 5 m or more lead wire length. 4. Internal circuit of contact protection box ZSE ISE Set the possible minimum pressure for adsorption when used for adsorption confirmation. If setting the pressure lower than that, switch becomes ON in case when adsorption is not complete.

Vacuum Ejector with Solid State Timer

Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05 07 10 13 15 Lead wire length 0.6m Lead wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting

Safety Instructions

Large flow filters should be used, especially in dusty locations. 13-1-5

The multi-pin connectors replace the

/N 5) Mixed mounting with 5 port valve is als VQC1000 up to 50 10.5 0.30 1.0 0.25 0.25 0.72 0.18 VQC2000 up to 80 16 0.30 3.2 0.80 0.15 2.6 0.60 VQC4000 up to 140 25 0.38 7.3 2.0 0.17 6.9 1.7 Note) Values for 2-position single from the cylinder port to the exhaust. (from 2 to 3 and from 4 to 5) C(Sonic conductance) and b(critical pressure ratio) are subject to ISO 6358/JIS B 8390.

VFA3000

double: VFA524402 03 04 ( ): Value for Rc(PT) 1 2 3.2-19 VFA5000 Dimensions/Base Mounted 3 positioin closed center/exhaust center/pressure center: VFA5 44-X1 02 03 04 3 4 5 SlA VlA SlA VlA VM/VR VH ( ): Value for Rc(PT) 1 2 3.2-20

VFRA3000

VFRA3111 5 pcs.

Air Suction Filter With One-touch Fittings Series ZFB 1

Do not use it in a line that is kept pressurized because it could cause the body to break. 13-10-5 3 Series ZFB Dimensions Element Replacement 1. Stop the operation and reduce the internal pressure of the filter to atmospheric pressure. 2.

Electro

4 60 PSI (4kg|/cm') 6 90 PSI (6kglicm") lnput Current 0-4-20mADC(standard) . l 1 5 m A D C ' 2 2 1 0 m A D C ' 3 5 2 5 m A D C *4 10 50 mADC ' Special Order o ,,' Ogeration'/ Construction Model MmOO(Lever type) Single acting, Normal operation When the input current increass, the armature witt be subjected to a clockwise torque, pushing the flapper lever to the teft.

CJ2

CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11

Switches

Power supply voltage 5, 12, 24VDC (4.5 to 28V) 5, 12, 24VDC (4.5 to 28V) Current consumption 10mA or less 10mA or less D-F9G, D-Y7GL 24VDC (10 to 28VDC) Load voltage 28VDC or less 28VDC or less DC (+) Brown [Red] 40mA or less 5 to 40mA Load current 80mA or less 40mA or less 80mA or less Main circuit of switch OUT Black [White] 1.5V or less (0.8V or less at load current of 10mA) 1.5V or

Antistatic Tubing TA  Series

(mm) 8 2 2.5 4 5 6.5 M Black (B) H/DL L/LL Air Fluid KC 20C 0.9 Max. operating pressure (MPa) 40C 0.7 KK Recommended fittings Antistatic one-touch fittings: KA series Miniature fittings: M and MS series Note) Minimum bending radius (mm) 10 15 20 27 35 10 KK130 0 to 40C Operating temperature Max.

Series TPH Clean Tubing Polyolefin Tubing

(mm) Burst pressure MPa 4 5 6.5 8 2.5 I.D.

Direct Operated Solenoid Valve Metal Seal Series VS4
10

5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.

VX31/32/33

B PPS Non-leak (106 Pam3/sec), Medium vacuum (0.1 Pa.abs), Oil-free M FKM FKM V C37 Note) The leakage amount (10 6 Pam 3/sec) for the V and M option are values when the differential pressure is 0.1 MPa. 5

® 3-Screen Display

Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to page 1114 for applicable auto switches other than listed above. Refer to pages 1328 and 1329 for the details of auto switches with a pre-wired connector.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

For MGQM20-21 st, MGQM20-30 st is provided with a 5 mm + 4 mm 9 mm width spacer. 2. For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

Motor฀Operated฀Auto฀Drain ADM200 Series

For drain piping, use a pipe whose I.D. is not less than 5 and length not more than 5 m.Avoid riser piping. Maintenance Caution Caution Provide a stop valve before the ADM200 to facilitate maintenance and inspection. If the valve becomes clogged with debris, press the manual button to flush out the debris. Otherwise, it could lead to malfunction.