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(CN1:EMG ) /P.11 3. 65 - No.LEC-OM00901 2009 6 No.LEC-OM00902 2010 4 No.LEC-OM00903 2011 7 No.LEC-OM00904 2012 4 UL 900~1700~ 2012 SMC Corporation All Rights Reserved 66 -

No.LEC-OM00302 2009 3 No.LEC-OM00303 2009 4 No.LEC-OM00304 2010 4 No.LEC-OM00305 2011 7 No.LEC-OM00306 2012 4 UL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 66

After the parameter is changed, it is necessary to reapply the power. 66 - Position deviation counter in the driver has overflowed during the operation by pulse signals. Overflow ALM [6C] 1-108 RESET C SVON Make sure there are no obstructions that interfere with the electric actuator movement.

PE08 (home position return position data) is applied as position address at the time of the home position return being completed. 13 66 13.

Qty O-ring KA00087 (P8) 4 Screw DXT010-66-2 2 Option Description Part no. Note Mounting bracket DXT010-37-4A Common exhaust type DXT010-37-3A Individual exhaust type (with O-ring and screws) DXT010-36-2A Common exhaust type Blanking plate Individual exhaust type Thread type (Refer to catalog How to order.)

Figure 5-66 MESSAGE Screen [Tips] The setting is not performed when the [NO] key is touched, which causes the CH1(2) Analog Output Setting screen 1, 2 where the box is flashing to be displayed. HRZD Series 5.3 Operation Screen 5-41 HRX-OM-M005 Chapter 5 Product Operation Procedure for setting analog output signal SCALING 1. Touch the [V Lo] key or [V Lo] key.

32 Specification 33 Specifications 33 Dimensions 33 -1No.EX-OMN0032-D Maintenance 35 Troubleshooting 36 Parameter Setting 45 Parameter definition and setting 45 Hardware Configuration 58 ESD file and icon 58 Precautions when connecting with OMRON PLC (EtherNet/IPTM master) 58 Connecting with Allen Bradley PLC (EtherNet/IPTM master) 59 I/O Map 62 Diagnostic 63 Details of diagnostic data 66

Fig. 2 When using a tying band to bind the piping together Unitmm Tubing size Mounting pitch A Straight line length Nylon tubing Soft nylon tubing Polyurethane tubing 3.2,1/8" 44 or more 35 or more 25 or more 16 or more 4,5/32" 56 or more 44 or more 26 or more 20 or more 6 84 or more 66 or more 39 or more 30 or more 1/4" 89 or more 70 or more 57 or more 32 or more 8,5/16" 112 or more 88 or

Fig. 2 When using a tying band to bind the piping together Unitmm Tubing size Mounting pitch A Straight line length Nylon tubing Soft nylon tubing Polyurethane tubing 3.2,1/8" 44 or more 35 or more 25 or more 16 or more 4,5/32" 56 or more 44 or more 26 or more 20 or more 6 84 or more 66 or more 39 or more 30 or more 1/4" 89 or more 70 or more 57 or more 32 or more 8,5/16" 112 or more 88 or

Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

Input unit LED Refer to fault and the input data No. 15. do not match. 66 No.EX-OMS0014-A Troubleshooting Fault No. 1 Fault Possible cause Investigation method Countermeasures Tighten the power supply cable connection. (if there is a broken wire, replace the cable).

for other sizes, re-insert it into the One-touch fitting without cutting the tube.When the tubing is re-inserted into the One-touch fitting, confirm that the tubing goes through the release button smoothly. tube tube tube 3.2 1/8 44 or more 35 or more 25 or more 16 or more 4 5/32 56 or more 44 or more 26 or more 20 or more 3/16 67 or more 52 or more 38 or more 24 or more 6 84 or more 66

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

N_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 (mm) Wiring (for power supply, communication, input and output) and piping are carried out on one side only.

Weight g ZB1/2-K1 (Single unit without sensor) 46 ZB3-K1 (One station for manifold without sensor) 40 Pressure Sensor, Vacuum pressure switch Model of pressure sensor and vacuum pressure switch Weight g ZB1-PS-A (Weight excluding the cable) 5 ZB1-ZS-A 14 (Weight excluding the lead wire assembly with connector) Manifold Base Stations 1 2 3 4 5 6 7 8 9 10 11 12 Weight g 16 22 28 34 41 47 53 60 66

Command (decimal number) Command name Evaluation method 0x41(65) SP1 single value teach Determined set point 1 0x42(66) SP2 single value teach Determined set point 2 0x80(128) Device Reset Restart the device 0x82(130) Restore Factory Settings Values are set to the factory settings 0xA8(168) Teach measuring range start Set the start position for measuring range 0xA9(169) Teach measuring range

How to Order 23 Summary of Product Parts 24 Connector (Base only) 25 LED Display 26 LED indication of base 26 LED indication of remote 28 Setting and Adjustment 29 Setting 30 Dimensions 44 Hardware Configuration 46 GSDML file and icon 46 Configuration Layout 46 Connection of SIEMENS PLC S7 47 I/O Map 55 I/O mapping order of base/remote 56 Diagnostic allocation 65 Detailed diagnostic data 66

Move to a point at 100mm on Axis 1 and 50mm on Axis 2. 66 No.SFOD-OMT0010-B 8.5 Circular interpolation Circular interpolation by specifying the target coordinate (relative) and centre coordinate (relative) referring to Axis 1 as the X axis and Axis 2 as the Y axis. Clockwise circular interpolation is in CIR-R mode and counterclockwise is in CIR-L mode.