NCA1

E C I A L R O D T H R E A D X A O P T I O N Thread Form Code M .

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

VCA

= 280 l = 300 25 D side U side Stations 1 2 3 4 5 n (Front ported) IN port 2-3/8 72 55 38.5 42 37 25 P = 28.5 24.5 12.5 OUT port n-1/4 25 19.5 Mounting valve: for conduit terminal (P = 34.5) Side ported: L1 = n x 28.5 + 10.5 L2 = n x 28.5 + 20.5 Front ported: L1 = n x 28.5 + 50.5 L2 = n x 28.5 + 60.5 Dimensions (mm) L n 8 238.5 248.5 278.5 288.5 9 267 277 307 317 10 295.5 305.5 335.5 345.5

CM2

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(4) L L Cylinder A Cylinder A Auto switch position Auto switch position Dimensions by Mounting Style (1) (2) Cylinder B Cylinder B Bore size (mm) Auto switch model L d L d D-A9, D-A9V 0 15 27 (37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d L d L 8 D-F8 0 15 47 25 D-M9W, D-M9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style (1) (2) (3) (4) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Free-Mounting Cylinder with Air Cushion Series CU

through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

11 5.5 M3 x 0.5 8 L 12 7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

Digital Flow Switch (Integrated display type)

8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 33 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1] Hysteresis (OUT1) [ CoL] Display colour (OUT1) [ SoG] ON

HRX-OM-Z002

min CH125/35(0.5MPa)CH22/2(0.5MPa) Maximum flow rate 50/60Hz(note12) L/min 55/65 Pump capacity Maximum pump head m 50 Settable pressure range(-P) MPa 0.1 to 0.5 Minimum operarating flow 50/60Hz6) L/min CH125/35(-P : 15)CH21/1 Tank capacity(Total of ch1 and 2) L Approx. 18 Fluid outletFluid return port size CH1Rc1CH2Rc1/2 Drain port size Rc1/4 Stainless steel, Copper(Heat exchanger brazing

Flow Sensor Series PFMV

0.0 to 1.0 l/min 0.0 to 3.0 l/min 0.5 to 0.5 l/min 1.0 to 1.0 l/min A 3.0 to 3.0 l/min Mounting screw Analog output (1 to 5 V) Output specification 1 2 L-type brackets (with 2 mounting screws) are included.

ITV

Connection Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000

CU

through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.