PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Vibration, Noise L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEJ40 M5 3.0 5.5 36.5 LEJ63 M6 5.2 6.8 49.5 Items for internal check 1. Lubricant condition on moving parts. For lubrication, use lithium grease No. 2. 2. Loose or mechanical play in fixed parts or fixing screws.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

VCB

44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

HRX-OM-X084

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Digital Flow Switch (Integrated display type)

8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 33 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1] Hysteresis (OUT1) [ CoL] Display colour (OUT1) [ SoG] ON

Compact Hydraulic Cylinder Series CH
KGB

Nil R H W Through hole Front taps Rear taps Double side taps Piston rod C dimension End thread size F dimension Interchangeable contents Dimensions CHKGB--XC62 F with effective thread depth G Width across flats f c D d a Width across flats E e b g H h + Stroke X with thread depth Y Note1) J B + Stroke C Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

HRX-OM-X071

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

7

4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Digital Flow Switches

Minimum measured Maximum measured Minimum measured Maximum measured Minimum measured Maximum measured Part nos. flow rate value [l/min] Part nos. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2

Digital Flow Switches, Series PF2A, Series PF2W

Minimum measured Maximum measured Minimum measured Maximum measured Minimum measured Maximum measured Part nos. flow rate value [l/min] Part nos. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

IIIIIII

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Mechanical Valves Series NVM, NVFM, NVZNI

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

Clamp Cylinder Series CK1

6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

Digital Flow Switches Series PF2A

to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse value (Pulse width: 50 ms) Note 1) Note 2, 3) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3