VHK

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 22 36 110 180 544 612 873

Compact Vacuum Unit

(Fig. 3) Bracket part number for single unit: ZB1-BK1-A Two mounting screws (M2 x 0.55 inch (14 mm), with washer) and two M2 nuts are included. Recommended fittings: KJH04-M5, KJL04-M5, KJW04-M5 Manifold Caution 1.

VHK

20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-03S-12F VHKl-04S-10F 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-04S-12F 1 4 17.5 16.1 9.7 7.2 3 8 17.5 16.1 17.5 16.1 1 2 3 port valve Reference dimensions after insertion of R(PT) threads.

VHK

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Silencer Series AN

Note 3) The product can be used in temperatures 14 to 140F (10 to 60C) if there is no risk of water droplets forming and freezing. Refer to page 5 for Precautions on these products.

Refrigerated Thermo-chiller

5/7 13/14 5/5 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 26 60 46 20 14 Refer to page 94.

IDX-OM-O004E

Specification for Option T 14 . 1 Safety instructions . 14 1 14 . 2 Specifications . 14 1 14 . 3 Remote operation . 14 1 14 . 4 How to connect the power and signal cable . 14 2 14 . 5 Electric wiring diagram . 14 3 i Safety Instructions Safety Instructions Before using the product be sure to read and understand all the important actions highlighted in this manual. i.1 Warning: Before using

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

14 Power cable b View b View a a Wiring Cable description Color Signal description Pin no.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping on the bottom Bore size (mm) 16 20 S 9 6.5 WX 30 32 Y 6.5 8 Applicable O-ring C6 C6 (Mounting side should be machined to these

MXS Series Air Slide Table

End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.

240

6 10 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 11 Motor plate Aluminum alloy Anodized 12 Guide ring Aluminum alloy Size 10 only 13 Bearing 14 Bushing Oil impregnated sintered copper alloy 15 Soft wiper r w !5 !4 !3 e u !

Environment

Note 14) For an actuator with lock, add the power consumption for the lock.

Wireless System

A B A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature