HRX-OM-S010

Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking. 6-2 1.1 Communication mode and operation method HRS100/150 Series 1-2 HRX-OM-S010 Chapter 1 Read before using 6.3.1 Setting and checking items . 6-2 6.3.2 Setting and checking . 6-3 HRS100/150 Series 1.1 Communication mode and operation method 1-3 HRX-OM-S010

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

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(Same sunace) (n =2, 4. 6, S .. ) (I = 4 , 8, 12. 1 6'~"),--,-_ "-=,-4" '::J ~".-, ..,( ", = S. 12 ' =-6._) -1 R. Different surfaces 35 110 1 ~ ~N~_~s.

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MXF

M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke

A-HEC-OM-J004

Maintenance . 6-1 6.1 Before returning the product . 6-1 Chapter 7 Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment

AIR COMBINATION

N.C. type is recommended. 18 6.

MHF2

6 Parts list Parts list Note Material No. Description No.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

180° Angular Style Air Gripper Series MHY2/MHW2

= 9.0 x 10-6 (kgm2) Moment of inertia around Z axis = Z1 m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6

VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

Cylinder with Lock Series CLS

(n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 90 95 D-M9AVL 95 + 30 (n2) 2 (n = 2, 4, 6, 8) 15 + 30 (n2) 2 90 + 30 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 pcs.

New

Stainless steel E 230 VAC 6 D K L N.C. N.O.

ZQ-OM01301

Note 3) (6) and (7) do not need to be selected. 7 - Doc. No.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 !7 !

EXxx-OMO0027

Content of diagnosis 0 There is an error in Slot 0. 1 There is an error in Slot 1. 2 There is an error in Slot 2. 3 There is an error in Slot 3. 4 There is an error in Slot 4. 5 There is an error in Slot 5. 6 There is an error in Slot 6. 7 There is an error in Slot 7. Unit diagnosis byte1 Bit No.

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.