High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

132 6 22 11 17.5 depth 13.5 26 77 11 Rc 3/8 112.5 100 20 25 98 28 89 100 67.5 M20 x 2.5 156 6.5 26 12 17.5 depth 13.5 26 94 11 Rc 3/8 132.5 107 24 30 117 29 95 Rod end male threads (mm) H X D L K C Bore size (mm) 20 M8 x 1.25 18 15.5 10 23 8 32 M14 x 1.5 30 27 16 38.5 14 40 M14 x 1.5 30 27 16 38.5 14 50 M18 x 1.5 35 32 20 46 18 63 M18 x 1.5 35 32 20 46 18 80 M22 x 1.5 40 37 25 51 22 100

IDX-OM-W026

M 11 M 11-1 ( ) IDF Series 11-1 11 1 IDX-OM-W026 11 M 11-2 ADM200 IDF22E-**-M IDF37E-**-M IDF55E-**-M IDF75E-**-M IDF-S0090 1.0MPa 1 1 2 / AC200V(50/60Hz) 4W (10, 0.95m) (10, 0.95m) 11-3 (1 1 )() 11-4 M 6-4 6-3 T 13-6 13-3 IDF Series 11-2 11 2 IDX-OM-W026 12 R 12 R 12-1 12-2 1 AC100V AC200V INOUT IDF22E/37E/55E-**-R 10A 30mA IDF75E-**-R 15A 30mA IDF Series 12-

OMR0031

External Connection (P.20) for wiring. Refer to section 17.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

SMC Electronic Switch Series Variations

16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions/ISE2l01 T1 01 T1 01 T1 Grommet style/ISE2l-15 Connector style/ISE2l-15C trimmer Pressure setting trimmer Pressure setting Indicator light Indicator light PSE ZSE4 ISE4 15 Lead wire length 600 15 (3000) L H 20 20 ZSE5 ISE5 Lead wire length 600 ZSE6 ISE6 ZSE3 ISE3 (3000) GS 9.5 PS ISA 39 8.5

Process Valve Series VNA

Slotted locking type B (tool required) Note) 2 Note 1) Electrical entry: D or DZ only 15A 1 2 15 14 3 20 16 Note 2) Semi-standard 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Electrical entry/With light/surge voltage suppressor Flange E GS G Symbol Electrical entry Valve size

High-Precision Digital Pressure Switch

With bracket ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Option 2 30 A1 25 20 Bracket A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L

1.63

30 14 16 20 20 26 30 64 68 78 92 132 160 24 26 35 35 44 48 123 146 178 193 247 274 108 128 156 172 220 248 126 146 176 192 240 266 76 92 112 128 168 196 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 9 12 12 15 15 20 20 20 23 25 27 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 13 15 20 20 22 22 5.4 5.4 6.7 6.7 8.6 8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1

MK

0.8 6.5 14h9 29 38 With arm/MKl -llN 12 16 M R Q P O N S Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

PFxx-OMX0002

Characters Number of digits 1 2 3 4 5 6 7 8 9 seg 11 seg 7 seg 7 seg 7 seg 7 seg 11 seg 7 seg 7 seg 7 seg : 1st. and 6th. digits are displayed in 11 seg. Others are displayed in 7 seg. Character for 7 segment display Character changes as below by pressing the or button.

JCRB-OM00003

20, 30, 40) Component Parts No.

KA

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

527 547 n: Stations (11 stations max.)

Guide Cylinder Series MGG

the same as those on pages 17, 18, 19 and 20.

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5