LEY-OM007

41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Pressure Sensor for General Fluids

g -12No.PS-OMG0006-D Analogue output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0006-D Dimensions PSE5601 , PSE56N01 02 N02 Be sure to release the air in the air tube of the cable to the atmosphere.

SFOD-OMT0010

Controller and Peripheral Devices / Specific Product Precautions 101 14.1 Design and selection . 101 14.2 Handling Precautions . 101 14.3 Mounting . 103 14.4 Wiring . 103 3 No.SFOD-OMT0010-B 14.5 Power supply . 104 14.6 Grounding . 104 14.7 Maintenance . 104 15. Troubleshooting . 105 15.1 Operation Errors . 105 15.2 Position / Speed problems . 108 Supplement 1.

Multi-channel Digital Sensor Monitor

(Additional range) Relation between the sensor input and pressure display Pressure range Set value A B Fine differential pressure 0.002 0 kPa 2 kPa Vacuum pressure 0.1 0 kPa -101 kPa Compound pressure F0.1 -100 kPa 100 kPa Low pressure 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa Positive pressure 1.0 0 MPa 1 MPa 1.6 0 MPa 1.6 MPa 2.0 0 MPa 2 MPa 5.0 0 MPa 5 MPa High pressure 10.0 0 MPa 10 MPa 20.0

VQ4000

44 50.5 12 Stations 38 26.5 Connector location on D side (FD) 37.5 10.2 91 163 12 43.5 50.5 59 96.5 D side Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum standard 18 stations) Dimensions L n 12 363 376 L1 L2 11 338 351 10 313 326 9 288 301 8 263 276 7 238 251 13 388 401 6 213 226 14 413 426 5 188 201 15 438 451 4 163 176 16 463 476 3 138 151 17 488 501 1 2 113 126 18 513 526 88 101

PSE200

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 x 0.8 Options Sensor cable (3m) + Connector (1 pc.)

ZR

Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Step Motor Controller

Size End width L :2.0 to 2.4 [mm] End thickness W :0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 66 Series LECP1 Dimensions 38 36.2 85 4.5 for body mounting 18.1 1.2 4.5 110 101 86 4.5 for body mounting CN4 I/O connector CN3 encoder connector CN2 motor connector CN1 power supply connector 67 Programless Controller Series LECP1 Precautions Model Selection Wiring Example

Dual Rod Cylinder Series CXSJ/CXS

pressure (MPa) Deflection X mm Rod size (mm) Bore size (mm) direction Piston area (mm2) Operating 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 OUT 11.2 56 CXSJ6 4 4.6 21.7 18.6 15.5 12.4 9.3 IN 6.2 31 110 94.2 78.5 62.8 47.1 OUT 31.4 157 15.7 Extended rod CXSJ10 6 70.0 60.0 50.0 40.0 30.0 IN 20.0 100 10.0 247 212 177 141 106 OUT 70.6 353 35.3 CXSJ15 8 176 151 126 101

Electric Actuator

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RP 8150SZ Printed in Japan. D-SZ

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10,

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

SMC

0.5 thread depth 4 (With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 depth 3 +0.025 0 12 F +0.025 0 N 1 x F 2 3H9 depth 3 30 24 M 0.5 23 24 Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101

Manifold Specifications

10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 L1 L2 Insert plug with lead wire: VV5ZS2-51GStation 1Port size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101

"MANIFOLD, 4/5 PORT SOLENOID VALVE

PSE200.eng

OUT2 ( ) ( ) ( ) ( ) For compound For vacuum For low pressure For positive pressure 101 kPa -101 kPa [Default setting] 101 kPa 1 MPa During the zero clear operation, pressure above 5%F.S. (2.5%F.S. for compound pressure) has been applied. After 2 s, the mode will reset to the measurement mode. The set values are displayed in auto-preset as follows.

Sensor Monitor

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2022 SMC Corporation All Rights Reserved. No.PS-OMU0012-C

DOC1023126

The motor was rotated while the initial data of the encoder was communicating (101) C Input RESET Turn the RESET ON when the actuator is stopped. This alarm occurs when an abnormality in communication with the encoder is detected when the power supply is turned on.

JXCx-OMT0005CN

Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM