Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Compact Rotary Actuator Series CRQ2

40 28.5 M8 CRQ2X MSQX MRQ Auto Switch Proper Mounting Position at Rotation End Reed switch Solid state switch Size Rotating angle Operating angle ( m) Hysteresis angle Operating angle ( m) Hysteresis angle B A B A 90 15 19 25.5 21.5 180 61 63 12 5 10 18 22 35 31 360 25 29 56.5 52.5 90 18.5 22.5 31 27 180 47 52 9 4 15 22.5 26.5 43.5 39.5 360 30.5 34.5 68.5 64.5 90 36 40 52.5 48.5 A 180 40 41

Digital Pressure Switch

[February 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017-2022 SMC Corporation All Rights Reserved No.PS-OMU0003-D

Digital Pressure Switch

[November 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2022 SMC Corporation All Rights Reserved No.PS-OMS0007-H

High-precision Digital Pressure Switch

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2021 SMC Corporation All Rights Reserved No.PS-OMV0009-E

High Vacuum L Type Valve

XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Rotary Table

E: Added external shock absorber type variations. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

LJ1H

screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101

LJ1H

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

PS-OMH0005CN

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

MRQB-OM0002

1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101

JXCx-OMT0001CN

) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26 4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41

Step Motor Driver （ Pulse input type ）

Therefore, + / of input terminal is not indicated in the table above 41 - Differential input connection Command pulse input configuration Pulse Input termi LECPA and Option set Forward rotation (CW) Reverse rotation (CCW) Direction nal 1 High High PP+ Low High PPLow Low 0 High High NP+ Low High NPLow Low High PP+ Low Low High High PPLow 1 High NP+ Low Low High High NPLow CW and CCW High High

LEC-OM034xx

The address is shown. (099) The treble is shown about the transmission rate of controller IF Node address setting ADDRESS B RATE Node address X10 X1 0 or 8 0 0 0 0 : 9 1 : 8 1 : 98 9 9 99 1 or 9 0 0 100 0 : 2 1 : 5 101 : 125 Do not set B RATE to the value of "Unused" Node address becomes 125 when a setup of a node address is set as a larger value than 125.

IDX-OM-W016

or more COMPRESSED AIR OUTLET Rc1 COMPRESSED THERMOMETER EVAPORATION AUTO DRAIN AIR INLET Rc1 872 396 TARMINAL BLOCK VENTILATION VENTILATION 578 43 2702 15 101 3801 258 4x 13 DRAIN TUBE (O.D.10,LENGTH:0.8m) GROMMET ELECTRICAL ENTRY( 17) 6-4 Electrical Circuit IDFA3E / 4E / 6E / 8E IDFA11E GFGI For Option R GFGI For Option R L N PE L N PE TB TB ILS ILS For Option V EVD For Option V EVD

JXCx-OMT0002

Power supply connector . 38 6.1 Connector specifications . 38 (1) Main control power supply connector: C PWR . 38 (2) Motor drive power connector: M PWR . 38 (3) Motor control power supply connector: CI . 39 6.2 Wiring . 40 (1) Wiring of the power supply connector. 40 (2) Wiring of the stop switch . 41 7. EtherNet/IP communication connector . 43 8.