45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

FGD-C

) 12 (18) 13 14 15 1-2. 16 17 FGD-KT001 FGDC 1 FGD-KT002 FGDE (1)(2)(3)(4) (FGD*B2 ) FGD-KT003 FGDT FGD-KT004 FGDF FGD-CV005-03 FGDTF*-03 FGD-CV005-04 FGDTF*-04 FGD-CV005-06 FGDTF*-06 (5) FGD-CV006-03 FGDCE*-03 FGD-CV006-04 FGDCE*-04 FGD-CV006-06 FGDCE*-06 FGD-OP001 FGD*B (10) KT-FGDC FGDC KT-FGDE FGDE (2)(4)(6)(13)(16) KT-FGDT FGDT KT-FGDF FGDF FGD-CA002 FGDT,F(L250) (7)(9)(11)(12)(

Regulator

03 03 03 03 3/8 04 04 04 04 1/2 4 + Nil Nil Nil Nil Without mounting option a Mounting B B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch EB EB EB EB PNP open collector 1 output EC EC EC EC NPN

CL

5 !6 !7 !8 !

CL

5 !6 !7 !8 !

Table of Contents

5, !6 Seal kit includes !4, !5, !6.

SZ3000

Switching Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Number of solenoids Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly Plug Plug (A) (4) (B) 2 SX100-40-4S (A) 4 (B) (2) Double Common connector assembly (with common lead wire) SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common wire SS5Z3-60-04-C6 . 1set SZ3160-5MO . 2set SZ3260-5MO . 2set SX100-40-4S . 1set (with

EXxx-OMO0027

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to master per unit. 2s complement 2s complement.

Multi-Connector with One-Touch Fittings Series DMK

(Optional) Multi-connector Socket side only Socket case Plug side only ADC12, White half-polished finish DMK6-23 DMK6S-23 Plug case DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 Clamp ring DMK6P-04 SPCC, Chromated Plate DMK12S-23 DMK12-23 DMK12P-23 12 DMK-C-12 SPCC, Zinc chromated A5052, Hard anodized Holder DMK12S-04 DMK12-04 DMK12P-04 Socket C3604BD Electroless nickel plated, POM, Stainless steel

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

Model Plug side only DMK6P-23 DMK6P-04 DMK12P-23 DMK12P-04 Multi-connector DMK6-23 DMK6-04 DMK12-23 DMK12-04 Socket side only DMK6S-23 DMK6S-04 DMK12S-23 DMK12S-04 Cover Clamp ring 6 DMK-C-6 DMK6-P01 12 DMK-C-12 DMK12-P01 Specifications Applicable tubing materials Applicable tubing O.D.

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

) With 4 selftapping screws Note) ISO228 compliant Port size Port size Rated flow range 501 102 No 04 * 1/2 * bracket Output specifications OUT1 OUT2 A B C D NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Note) Each option is not assembled with E Analog 1 to 5 V the product, but shipped together.

IDX-OM-W029

IDX-OM-W029 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W029 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W029 5 5-2 (IDU55E,IDU75E) 1-1 5-1 OFF IDU22E,55E,75E OFF IDU55E IDU75E () ON IDU55E,75E OFF ON IDU Series 5-2 5 3 IDX-OM-W029 6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1)

VR4151/4152

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is turned

IDX-OM-W032

4-2 4 3 IDX-OM-W032 5 5 5 1 3 ON OFF 5-2 60cm 1 5-2 5-2 10% 5-2 ( ) ( ) 60cm 1 10% 3 IDFA Series 5-1 5 1 IDX-OM-W032 5 ( ) 60cm 1 2 INOUT INOUT () IDFA Series 5-1 5 2 IDX-OM-W032 5 5-2 (IDFA55E,IDFA75E) 1-1 5-1 OFF OFF IDFA22E55E IDFA75E () ON OFF ON 5-2 IDFA Series 5 3 IDX-OM-W032 6 6 6-1 IDFA22E IDFA37E IDFA55E IDFA75E 3 oC 182 m 3/h 273 m 3/h 390 m

IDX-OM-X004

4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5 1 5 1 1 Failure diagnosis chart

Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.