IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series IDG

to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) LM Ports 2, 4 size (inch) Nil PNP (+) or without SI unit/input block (SD0) Ports 2, 4 Symbol N3 N7 N9 NM Ports 1, 3, 5 NPN () N 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Mixed Top ported elbow 5/32" One-touch fitting Top ported elbow 1/4" One-touch fitting Top ported elbow 5/16" One-touch fitting Bottom ported elbow 5/32" One-touch

Title not found

4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked

4-channel Flow Monitor ( compatible)

The time interval for memorizing is 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

ISA2

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

IDX-OM-W023

. i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-

JXCx-OMT0028CN

GW GW (CN1CN4) 5.

Title not found

@numoer ,Inn|i''tral lo'd Double acllng Singte rcd o32 to s4clls lo 1O0 a50 to s1OU10 to 100 Axial piping (c.nri.liEd FiFine) Double acling Single rod o12, o 16/5 to g azo, a25/5 to 50 a32, o4O/5 lo 1N o50 to 01 0C/1 0 to 1 00 Single acting Spdng rctum/er.lend 612lo o4O/5, 10 z5U1O,20 ,.option" 12 to 1m 12 to 10O ,,r,${*i**#{rt$**F_\r;,;tl:r,r. : ..

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

PSxx-OMU0008CN

/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1

One-touch Fittings

Tubing size Tensile force of tubing [N] 2, 3.2, 1/8" 5 4, 5/32", 3/16" 8 6, 1/4" 12 8, 5/16" 20 10, 3/8" 30 12, 1/2" 35 16 50 2) Removal of tubing (1) Push the release button flange evenly and sufficiently to release the tube. Do not push in the tubing before pressing the release button. (2) Pull out the tubing while keeping the release button depressed.

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.