JXCx-OMT0002

Setting Data Entry . 48 9.1 Profile parameter . 48 9.2 Basic parameter . 49 9.3 Return to origin parameter . 51 9.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10.

Compact Vacuum Unit Ejector/ Vacuum Pump System

min(ANR)] Supply pressure [MPa] Nozzle I.D. 0.4 Supply Valve: Latching Type/ZB04-Q1/Q2 Exhaust characteristics Flow characteristics (Characteristics when the supply pressure is 0.45 MPa) Vacuum pressure Air consumption[L/min(ANR)] Vacuum pressure[kPa] Vacuum pressure[kPa] Suction flow[L/min(ANR)] Air consumption Suction flow Vacuum pressure Supply pressure [MPa] Suction flow [L/min(ANR)] 51

Fieldbus system (CC-Link compliant)

Wiring 31 Setting 35 Specifications 35 Specifications 35 Dimensions 36 Output Unit Summary of Product Parts 37 Mounting and Installation 38 Installation 38 Wiring 39 Specifications 42 Specifications 42 Dimensions 42 -1No.EX-OMI0001-I Input Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 46 Specifications 50 Specifications 50 Dimensions 50 Maintenance 51

Programless controller (with stroke study) Step motor (servo 24 VDC)

Check if the load of the electric actuator is within the specification range. 51 No.JXC-OMU0030-A Output current at the power supply circuit is abnormally high. Control power supply is shut down E Any condition Check if the actuator cable or connector is short-circuited. Confirm the combination of the controller and the electric actuator is correct.

Multi-channel Digital Sensor Monitor

Environment Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more between terminals and housing (with 500 VDC megger) Ambient temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation) Operating humidity range Operation and storage: 35 to 85%RH (No condensation) Standard CE marked (EMC directive, RoHS directive) Body 51

CEx-OMP0016

Diaphragm shell Stainless steel 4 11 Belt separator Special resin 2 46 Diaphragm NBR 2 12 Guide roller Special resin 1 47 Brake body Aluminum alloy 1 Hard anodized 13 Parallel pin Carbon steel 1 48 O-ring NBR 1 14 Seal belt Special resin 1 49 Slide table Aluminum alloy 1 Hard anodized 15 Dust seal band Stainless steel 1 50 Sensor body Aluminum alloy 1 Chromated 16 Belt clamp Special resin 2 51

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

[mm] 10 5 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] *3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42 56.4 28 specification Motor type Battery-less AbsoluteStep Motor 24VDC Encoder Battery-less Absolute Power supply voltage [V] 24VDC10% Power [W] *4 Max. 57 Max. 51

HRX-OM-I051

50Hz/60Hz) kW 1.0 (At 20C) 2.0 (At 20C) 4.0 (At 20C) 8.0 (At 20C) Operating temperature range C 20 to 90 Temperature stability C 0.1*2 Ethylene glycol aqueous solution 60%*3 Circulating fluid (No intrusion of foreign body) Refrigerant R404A(HFC) (CFC Free), Quantity of refrigerant kg 0.75 0.75 1.15 1.15 Pump capacity*4 (50Hz/60Hz) MPa 0.25 / 0.35 (At 20L/min) 0.25 / 0.40 (At 20L/min) (36 / 51

Digital Gap Checker

. -] Page 50 F 6 ( FSt) Display value compensation [ 0.0] Compensated value: 0.0 Page 51 F10 ( SUb) Sub screen [.

Series MLGP

D-M9V D-Y69 D-Z7/Z80 D-A9V D-M9WV D-Y7PV D-P3DWA D-P3DW D-P4DW D-Y59/Y7P D-M9AV D-Y7WV D-Y7W D-Y7BA Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 20 18.5 22 24.5 20 25 20.5 24 26 21.5 32 30 32 23 26.5 29 24.5 35 33 41.5 40 27 30.5 33 28.5 39 37 44.5 50 32.5 36 38.5 34 44.5 42.5 50 63 39.5 43 45.5 41 51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

With shock absorber (mm) With bumper bolt (mm) (mm) (NC) Y: Minimum (NA) X: Minimum necessary space necessary space 6 19 44 11 32 10 28 58 10.5 34 15 28 58 10.5 34 20 28 63 10.5 39 25 49 89 12.5 41 32 52 99 11.5 43 40 51 99 10.5 43 Note) The dimensions above show the minimum necessary space for the replacement of the shock absorber and bumper bolt. (Full length of the stopper + 10mm) 2.

Solenoid Valve

No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42 No.SQ1000V-OMQ0002-B 43 No.SQ1000V-OMQ0002-B 44 No.SQ1000V-OMQ0002-B 45 No.SQ1000V-OMQ0002-B 46 No.SQ1000V-OMQ0002-B 47 No.SQ1000V-OMQ0002-B 48 No.SQ1000V-OMQ0002-B 49 No.SQ1000V-OMQ0002-B 50 No.SQ1000V-OMQ0002-B 51

Electric Actuator Miniature Rod Type Miniature Slide table Type

(At stop(EMG) or SVRE[OFF]) 51 - Revision history No. LEP-OM00201 Oct / 2011 1st printing. No.LEP-OM00202 Apr / 2012 Revision Addition / Note about UL recognition.

Regulator Valve

Example: VEX1300-03 240 VAC 240V VK300-82-2-07 G36-4-01 6 VDC 6V VK300-82-4-51 12 VDC 12V VK300-82-4-06 Sub-plate and gasket part no. 24 VDC 24VDC VK300-82-3-05 48 VDC 48VDC VK300-82-3-53 Body size 2 Circuit with indicator light 12 VDC or less 24 VDC or more AC circuit Sub-plate circuit diagram circuit diagram diagram Base gasket VEX1-11-2 How to Wire DIN Terminal (VEX1101, 1201, 1301) D

High Vacuum L Type Valve

control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51

11-cu-e

.: GR-S-010 (10 g) 51 Free Mount Cylinder/Single Acting, Single Rod, Spring Return Series CU 10, 16, 20, 25, 32 Construction With auto switch Single acting, spring return Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters 10 !8 !9 !8 !9 16 to 32 !8 !

Title not found

(800) 526-7661 3/8 Male Pipe Thread to Tube 3/8 Male Pipe Thread to Tube 11/16 Hex Typ. 3/16 29/32 1 11/32 13/16 17/32 29/32 11/16 11/16 51 3/8 B2 1/2 3/8 B2 3/8 B4 3/8 B6 3/8 B3 3/8 B8 3/8 Male Pipe Straight Manifolds #1 Barb P/N 3/8B1 x 2 3/8B1 x 3 3/8B1 x 4 3/8B1 x 5 3/8B1 x 6 3/8B1 x 7 #2 Barb P/N 3/8 B2 x 2 3/8 B2 x 3 3/8 B2 x 4 3/8 B2 x 5 3/8 B2 x 6 3/8 B2 x 7 #5 Barb

Series 10-MGF Guide table ø40, ø63, ø100

Maximum tightening torque Nm L(mm) Model Bolt M6 x 1 MGF40 10 7.5 M8 x 1.25 MGF63 25 9 M10 x 1.5 MGF100 51 9 Mounting from bottom side 4. Do not bring objects that are sensitive to magnetism near the cylinder. The magnet is built into the cylinder. Do not bring magnetic disks, cards or tapes near the cylinder. Data may be lost. 5.

Cylinder with Turntable Series MGT

77 96.5 116 16.5 19 23 M6 x 1.0 M8 x 1.25 M10 x 1.5 22 26 32 58 54 62 39 46 56 8.6 10.6 12.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 25, 50, 75, 100, 125, 150, 175, 200 121.5 145 111.5 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB Nil TN TF NPT 1/4 117 128 168 58 74 89 54 56 71 100 125 150 24 24 35 188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51

10

18H9 0 depth 1.5 4 M5 x 0.8 (Finger opening port) 4 x M5 x 0.8 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 44 18.2 5.5 0.5 9 12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31 20 K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51