Air Slide Table

Pilot port side 27 Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12C-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12C-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12C-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12C-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12C-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12C-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12C-100Z 36 14 66 36

Electric Actuators

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

Air Cylinder

116 25 62 9 10 40 40 60 40 120 32 64 9 10 40 40 60 40 122 40 88 10 11 53 53 77 44.5 154 Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 25 32 36 72 85 97 110 135 160 185 32 32 36 72 85 97 110 135 160 185 40 41 46 77 90 102 115 140 165 190 Bore size With Rod Boot (mm) l Z ZZ JH JW 1 to 50 51 to 100 101 to 150 151 to

Air Cylinder Series CS1

90 59 43 14 16 15 31 19 85 8 35 36 145 115 188 100 Up to 1400 1401 to 1600 M14 x 1.5 157.5 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 16 15 31 19 9 35 36 161 128 100 188 112 Up to 1400 1401 to 1600 M14 x 1.5 180.5 M30 x 1.5 56 53 40 90 59 43 14 17 36 19 9 39 45 182 144 106 206 118 197 Up to 1400 1401 to 1600 18.5 M16 x 1.5 M36 x 1.5 63 60 45 70 48 17 20 41 24 10 39 45 204 162

CS1

Wiper ring Piston seal Valve seal Tube gasket Holder gasket Rod seal 125 CS1H125A-PS SDR-36 P7 C120 G55 RPS-125 SKY-36 140 CS1H140A-PS SDR-36 P7 C135 G55 RPS-140 SKY-36 160 CS1H160A-PS SDR-40 P7 C155 G55 RPS-160 SKY-40 1.10-6 Series CS1 Basic/CS1B Lube (CS1B), Non-lube (CS1BN), Air-hydro (CS1BH) With auto switch/CDS1B (mm) Stroke range (mm) Bore (mm) Style M KA K MM EA C D E B A AL J G FA

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

41 29.5 25 41 49 42.5 36 8 30 26 78 74 18 36 46 44.5 Inch Size Applicable tubing O.D.

Table of Contents

: T-slot pitch U N x P 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Free Mount Cylinder

30 36 40 42 Z 46 52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

Cylinder with Lock

31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 Bore size 37 Auto Switch Mounting C96N Series Minimum Stroke for Auto

CM2

40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e f B3 Stroke Bore size (mm) 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to 50 143 147 149 181 Stroke Bore size (mm)

Cylinder with Lock Series CLS

90 59 43 16 107 58 110 M14 x 1.5 15 31 65 Up to 1000 3 30 14 50 47 161 78 18 110 146 1/4 128 28 17 36 72 36 90 59 43 16 114 64 110 M14 x 1.5 15 31 75 Up to 1200 5 46 56 53 182 95 23 132 169 1/4 144 32 20 40 80 40 90 59 43 14 18.5 130 74 120 M16 x 1.5 17 36 80 Up to 1200 118 30 16 5 60 106 48 17 41 63 204 36 167 195 3/8 162 40 23 50 100 45 115 70 18.5 149 86 135 M18 x 1.5 20 90 Up to

ISO Standard Hydraulic Cylinder

29 40 12 22 22 19 23 19 34 10 40 16 8 3/8 58 D50 25 to 800 65 65 9 86 105 69 M8 x 1 9 M20 x 1.5 36.5 28.5 50 15 28 28 24 24 25 42 10 50 16 11 3/8 58 63 25 to 800 77 77 9 98 118 84 M8 x 1 9 M27 x 2 36 33 58 19 36 36 30 21 32 50 10 56 18 13 1/2 66 80 25 to 800 96 96 11 119 143 96 10.5 M33 x 2 41 32 M10 x 1.25 75 13 45 45 41 26 41 60 16 70 17 17 1/2 74 100 25 to 1000 115 115 13.5 138 162 113

CLS

36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162

ISO Cylinder

C85 Series: 8, 10, 12, 16 [cm] 10.0 Mounting Applicable maximum stroke according to buckling strength Operating pressure [MPa] Nominal symbol C85 Support bracket nominal symbol and schematic diagram 8 10 12 16 20 25 Foot: M Rod flange: G Head flange: G Lateral load applied to the rod end fR [N] 0.3 26 38 18 36 24 48 M 1.0 G G N U U M 0.5 19 29 14 27 18 36 W W W C8516 Rod (side) 0.7 16 23

LX

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

2 Phase Stepper Motor/Without Motor Brake Series LXS

5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 C 4H9 +0.030 0 depth 4 L-M6 Refer to Cross section C-C.

LX

: T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Cylinder with Lock Series CNS

2 93.5 343 95 20 28 110 472 35 35 35 M16 x 1.5 17 36 22 M36 x 1.5 39 3/4 104 396 109 25 35 120 538 Long Stroke With Rod Boot (mm) (mm) Bore size (mm) Stroke range (mm) Bore size (mm) Stroke range (mm) l ZZ1 h RT RY 125 140 160 125 140 160 455 0.2 stroke 36 164 133 30 to 1400 1401 to 1600 495 0.2 stroke 36 184 133 30 to 1400 1401 to 1600 559 0.2 stroke 45 204 141 30 to 1400 1401 to 1600 Not

Air Cylinder Series MB

33.5 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 46.5 39 36 43 36 40.5 38.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 51.5 44 45 52 45 49 46.5 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71 64.5 68.5 65.5 64.5 71.5 66.5 70.5 66.5 115 125 67.5 65 68.5 65 76.5 72 Operating Range (mm) Auto switch

Cylinder with Lock Series CLS

Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.